基于斩光取样与衰减技术的CO<sub>2</sub>激光功率校准装置

徐涛; 赵亚如

doi:10.12338/j.issn.2096-9015.2020.9059

基于斩光取样与衰减技术的CO₂激光功率校准装置

doi: 10.12338/j.issn.2096-9015.2020.9059

徐涛,
赵亚如

中国计量科学研究院，北京 100029

基金项目: 国家重点研发计划资助项目(2017YFF0205104)

详细信息

作者简介:
徐涛（1979-），中国计量科学研究院副研究员，研究方向：激光辐射度，邮箱：xutao@nim.ac.cn

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出版历程
- 网络出版日期: 2021-07-14
- 刊出日期: 2021-08-01

Calibration Device for CO₂ Laser Power Based on Chopper Sampling and Attenuation Technique

XU Tao,
ZHAO Yaru

National Institute of Metrology, Beijing 100029, China

摘要

摘要: CO₂激光器输出功率的稳定性和调节能力较差，在激光功率校准中严重影响校准结果的重复性和校准功率范围。通过分光取样监测系统对CO₂激光功率进行实时监测，可改善校准的重复性。但对于波长为10.6 μm的激光，常用的ZnSe镜片的监测比很不稳定，导致监测比的波动幅度过大。本文基于斩光原理，研制了斩光取样与衰减系统，衰减范围达到0.2%～50%。通过控制单元的优化设计，避免了同一束光路中两套斩光组件的相互干扰。对校准装置的监测比进行了测试，斩光取样系统的监测比不稳定度达到1.1%以内，显著优于CO₂激光功率的不稳定度（约5%）和ZnSe镜片的监测比不稳定度（8.6%）。利用该装置进行了CO₂激光功率校准测试，被测功率计修正因子的重复性（k=1）从无监测条件下的1.09%变为0.62%。本文提出的斩光取样与衰减系统，在CO₂激光功率校准中提高了校准结果的重复性，增大了功率调节范围。
- CO₂激光 /
- 激光功率校准 /
- 斩光取样器 /
- 衰减器 /
- 监测比
Abstract: The calibration repeatability of CO₂ laser and the power range that can be calibrated are reduced by the laser's poor power stability and adjustability. The repeatability can be improved by monitoring the CO₂ laser power in real time with a beam splitting system. But for 10.6 μm laser, the reflectance of ZnSe beam splitters is very unstable, which leads to fluctuation of the monitor ratio. Based on the principle of chopper, a chopper sampling and attenuation system was developed. The attenuation range is 0.2%~50%. Through an optimization design of the control unit, the interference between two sets of choppers in the same beam was avoided. The monitor ratio of the calibration setup was tested, and the monitor ratio instability was less than 1.1%, which is significantly better than that of ZnSe beam splitters (8.6%). The repeatability (k = 1) of the correction factor of the measured laser power meter improved from 1.09% (without a monitor) to 0.62%. The chopper sampling and attenuation system proposed in this paper improves the repeatability of calibration results and increases the power adjustment capability in CO₂ laser power calibrations.
- CO₂ laser /
- laser power calibration /
- chopper sampler /
- attenuator /
- monitor ratio

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图 1 CO₂激光功率校准装置框图

Figure 1. Schematic diagram of the calibration device for CO₂ laser power

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图 2 CO₂激光功率监测曲线：ZnSe镜片取样器

Figure 2. CO₂ laser power monitor curve with a ZnSe monitor

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图 3 CO₂激光功率监测曲线：斩光取样器

Figure 3. CO₂ laser power monitor curve with a chopper monitor

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图 4 CO₂激光功率监测曲线：斩光取样器与斩光衰减器

Figure 4. CO₂ laser power monitor curve with a chopper monitor and a chopper attenuator

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表 1 CO₂激光功率计校准结果

Table 1. CO₂ laser power calibration results

序号	标准监测值(W)	标准值(W)	被测监测值(W)	被测值(W)	修正因子（有监测）	修正因子（无监测）
1	2.691	30.3	2.653	29.6	1.0092	1.0236
2	2.676	31.0	2.694	31.1	1.0035	0.9968
3	2.647	31.0	2.650	30.6	1.0142	1.0131
4	2.710	31.8	2.709	31.4	1.0124	1.0127
5	2.558	29.5	2.596	29.6	1.0114	0.9966
6	2.629	30.1	2.629	29.8	1.0101	1.0101
7	2.713	31.2	2.740	31.6	0.9972	0.9873
8	2.738	31.5	2.735	31.6	0.9957	0.9968
9	2.654	30.9	2.636	30.5	1.0062	1.0131
10	2.662	31.2	2.678	31.1	1.0092	1.0032
重复性(k=1)					0.62%	1.09%

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