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Research on Micro Vibration Measurement and Analysis Method of Using
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摘要: 精密仪器已成为实验室必备的重要装备，振幅较微弱的环境振动已逐渐成为影响精密仪器测量精度的重要因素。为建立精密仪器使用环境微振动测试与分析统一技术标准，明确了测试系统构成及测试设备主要技术指标，详细表述了场地振动测试、建筑物振动测试和防微振基台振动测试基本原理，并给出振动数据采集要求和分析方法。此研究成果将为精密仪器使用环境选址测试及防微振工程过程质量控制和验收提供重要依据。Abstract: Precision instruments have become indispensable tools within laboratories. Subtle environmental vibrations are progressively recognized as significant determinants that can impact the accuracy of these instruments' measurements. To establish a consistent technical standard for the testing and analysis of micro-vibrations within precision instrument environments, this study delineates the configuration of the testing system and main technical specifications of the testing apparatus. It elaborately discusses the foundational concepts behind testing micro-vibrations in sites, structures, and anti-vibration base platforms. Additionally, this paper outlines the specifications for collecting vibration data and the corresponding analytical techniques. The insights from this research will serve as a crucial reference for selecting appropriate environments for precision instruments and for ensuring quality control and validation during the anti-vibration engineering phase.
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Key words:
- metrology /
- precision instruments /
- laboratory /
- micro-vibration /
- testing
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图 5 地面和孔中测试位置示意图
Figure 5. Diagram indicating test positions on the surface and within the hole
表 1 传感器选用技术要求
Table 1. Technical specifications for sensor choice
被测振动速度量
级/（µm·s−1）传感器频率
范围/Hz速度型传感器
分辨力/（m·s−1）加速度型传感
器分辨力/g6.25 1～100 10−6 10−7 3.12 1～100 10−6 10−7 1.56 1～100 10−7 10−7 0.78 1～100 10−7 10−7 注：被测振动速度量级指频域振动1/3倍频程均方根值。 
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