能量天平高灵敏度力传感装置研究

王越; 白洋; 李正坤

doi:10.12338/j.issn.2096-9015.2022.0288

能量天平高灵敏度力传感装置研究

doi: 10.12338/j.issn.2096-9015.2022.0288

中国计量科学研究院，北京 100029

基金项目: 国家重点研发计划项目(2021YFF0603803)；国家自然科学基金项目(52175527)；国家市场监管重点实验室（电学量子基准）2022年度开放课题(AKYKF2201)。

详细信息

作者简介:
王越（1994-），中国计量科学研究院博士后，研究方向：力值精密测量，位移精密测量等，邮箱：wangyue@nim.ac.cn

通讯作者:
白洋（1988-），中国计量科学研究院副研究员，研究方向：千克量子化复现，邮箱：baiyang@nim.ac.cn

李正坤（1977-），中国计量科学研究院研究员，研究方向：电磁计量与千克新定义复现，邮箱：lzk@nim.ac.cn

中图分类号: TB931
计量
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出版历程
- 收稿日期: 2022-11-25
- 录用日期: 2023-01-05
- 修回日期: 2023-06-29
- 网络出版日期: 2023-07-06

Research on a High Sensitivity Force Sensing Device of the Joule Balance

National Institute of Metrology, Beijing 100029, China

摘要

摘要: 高灵敏度力值测量是能量天平实现高精度千克复现研究的关键，现有横梁天平测力法与商用质量比较器测力在能量天平力值测量中会引入额外误差项。针对该问题，提出了一种基于多柔性铰链的高灵敏度力传感装置设计方法，该方法通过多柔性铰链实现力值与机构形变间的转换，然后利用激光干涉仪测量机构形变，实现高灵敏度力值测量，通过理论与有限元仿真分析对装置灵敏度和模态进行了仿真分析，该设计方法可实现灵敏度达8.13 N/m的力值传感。此项研究对下一代能量天平设计与千克复现研究有重要意义。
- 计量学 /
- 能量天平 /
- 千克复现 /
- 力值测量 /
- 柔性铰链 /
- 有限元分析
Abstract: Highly sensitive force measurement is a crucial aspect in the research of high precision kilogram realization using a Joule balance. Current force measurement methods involving beam balances and commercial mass comparators introduce additional errors in the Joule balance force measurements. In response to this challenge, we propose a design method for a high-sensitivity force sensing device based on multiple flexure hinges. This method uses multiple flexure hinges to translate force into structural deformation, which is then measured using a laser interferometer, enabling highly sensitive force measurements. We have carried out theoretical and finite element simulation analyses to simulate the sensitivity and modal performance of the device. This method can achieve a force sensing sensitivity of up to 8.13 N/m. Our research carries significant implications for the design of next-generation Joule balances and the advancement of kilogram realization studies.
- metrology /
- joule balance /
- kilogram realization /
- force measurement /
- flexure hinge /
- finite element simulation

HTML全文

图 1 能量天平测量原理图

Figure 1. Principle of joule balance measurement

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图 2 高灵敏力传感机构结构图

Figure 2. Structure of the high-sensitivity force sensor

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图 3 铰链参数示意图

Figure 3. Schematic of flexure hinge parameters

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图 4 不同参数对力传感机构刚度的影响

Figure 4. Influence of various parameters on the stiffness of the force sensor

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图 5 高灵敏力传感机构刚度仿真

Figure 5. Stiffness simulation of the high-sensitivity force sensor

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图 6 高灵敏力传感机构实物图

Figure 6. Physical model of the high-sensitivity force sensor

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图 7 三轴位移测量系统上位机界面

Figure 7. Interface of the triaxial displacement measurement system

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图 8 稳定性测试结果图

Figure 8. Stability test results

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图 9 测力灵敏度测试结果图

Figure 9. Force sensitivity test results

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表 1 高灵敏力传感机构模态分析结果

Table 1. Modal analysis results of the high-sensitivity force sensor

模态阶数 1 2 3 4 5 6

频率/Hz 0.7 13.5 25.3 61.2 74.2 107.9

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