基于光栅干涉仪的纳米位移台校准方法研究

刘丽琴; 管钰晴; 邹文哲; 郭创为; 张玉杰; 徐瑞书; 傅云霞; 雷李华

doi:10.12338/j.issn.2096-9015.2023.0114

基于光栅干涉仪的纳米位移台校准方法研究

doi: 10.12338/j.issn.2096-9015.2023.0114

刘丽琴^{1, 2,},
管钰晴^{1, 2},
邹文哲^{1, 2},
郭创为¹,
张玉杰¹,
徐瑞书¹,
傅云霞^{1, 2},
雷李华^{1, 2, ,}

1.
上海市计量测试技术研究院，上海 201203
2.
上海市在线检测与控制技术重点实验室，上海 201203

基金项目: 上海市2021年度“科技创新行动计划”自然科学基金项目（21ZR1483100）；国家重点研发计划青年科学家项目（2021YFF0603300）；上海市2021年度“科技创新行动计划”优秀学术/技术带头人项目（21XD1425000）。

详细信息

作者简介:
刘丽琴（1983-），上海市计量测试技术研究院助理工程师，研究方向：微纳米计量技术研究，邮箱：liuliqin@simt.com.cn

通讯作者:
雷李华（1985-），上海市计量测试技术研究院高级工程师，研究方向：微纳米计量技术研究，邮箱：leilh@simt.com.cn

中图分类号: TB921
计量
- 文章访问数: 250
- HTML全文浏览量: 113
- PDF下载量: 37
- 被引次数: 0
出版历程
- 收稿日期: 2023-04-21
- 录用日期: 2023-08-01
- 修回日期: 2023-07-27
- 网络出版日期: 2023-08-23
- 刊出日期: 2023-06-18

Study on the Calibration Method of Nano-Positioning Stages Using Grating Interferometers

LIU Liqin^{1, 2
,},
GUAN Yuqing^{1, 2},
ZOU Wenzhe^{1, 2},
GUO Chuangwei¹,
ZHANG Yujie¹,
XU Ruishu¹,
FU Yunxia^{1, 2},
LEI Lihua^{1, 2
, ,}

1.
Shanghai Institute of Measurement and Testing Technology, Shanghai, 201203, China
2.
Shanghai Key Laboratory of Online Test and Control Technology, Shanghai, 201203, China

摘要

摘要: 随着集成电路制造关键尺寸向着5 nm的节点迈进，我国集成电路检测设备产业化的呼声剧增，纳米位移台作为集成电路制造、超精密加工、精密科学仪器制造等领域检测设备的关键器件，研究人员对其重复定位精度、线性度的要求越来越高。光栅干涉仪以光栅作为标准物质溯源到长度基准，因其对环境因素的变化不敏感、抗干扰能力强、稳定性高的优点，成为微纳检测设备产业化的新方向。采用基于标准物质的光栅干涉仪，针对纳米位移台的重复定位精度、线性度分别设计了不同的校准方案，并通过实验验证方案的可行性，最后对该校准方法的测量不确定度和溯源性进行了分析，可以看出设计的校准方案测量稳定、溯源链短。
- 计量学 /
- 光栅干涉仪 /
- 标准光栅 /
- 位移校准 /
- 纳米位移台
Abstract: As the critical dimensions in integrated circuit manufacturing approach the 5nm node, the demand for the industrialization of integrated circuit testing equipment has surged. The nano-positioning stage, a pivotal component in semiconductor manufacturing, ultra-precision machining, and precision instrument manufacturing, is experiencing increasingly stringent demands for its repetitive positioning accuracy and linearity. The grating interferometer, which leverages the pitch of the grating as a reference material for measurement, showcases remarkable environmental resilience and superior stability. This makes the grating interferometer an emerging trend in the industrialization of macro-nano measurement equipment. This study presents a calibration method for the nano-positioning stage using a grating interferometer. The feasibility of this method is confirmed through experimental validations. Furthermore, an in-depth analysis of the measurement uncertainty and traceability chain is conducted, highlighting the robustness and shortened traceability path of the proposed calibration approach.
- metrology /
- grating interferometer /
- standard grating /
- displacement calibration /
- nano-positioning stage

HTML全文

图 1 光栅干涉仪原理图

Figure 1. Schematic of the grating interferometer

下载: 全尺寸图片幻灯片

图 2 基于光栅干涉仪的纳米位移台重复性校准方案

Figure 2. Calibration scheme for positioning repeatability of the nano-positioning stage using a grating interferometer

下载: 全尺寸图片幻灯片

图 3 基于光栅干涉仪的纳米位移台线性度校准方案

Figure 3. Calibration scheme for linearity of the nano-positioning stage using a grating interferometer

下载: 全尺寸图片幻灯片

图 4 重复定位精度校准实验平台

Figure 4. Experiment setup of positioning repeatability calibration system

下载: 全尺寸图片幻灯片

图 5 测量信号图

Figure 5. Measurement signal diagram

下载: 全尺寸图片幻灯片

图 6 校准实验图

Figure 6. Calibration experiment diagram

下载: 全尺寸图片幻灯片

图 7 基于光栅干涉仪的纳米位移台校准方法溯源性分析

Figure 7. Traceability analysis of the calibration method for the nano-positioning stage based on the grating interferometer

下载: 全尺寸图片幻灯片

表 1 基于标准物质的光栅干涉仪10次重复性测量结果

Table 1. Ten repetitive measurements using the grating interferometer based on a reference material /μm

序号	1	2	3	4		5	6	7	8	9	10
位移值	100.9343	100.9504	100.8810	100.8702		100.8260	100.8178	100.7467	100.7206	100.7382	100.6854
均值					100.8171
最大偏差					0.1333

下载: 导出CSV

表 2 纳米位移台线性度测量实验结果

Table 2. Linearity calibration results for the nano-positioning stage

		采样点
线性偏差 (μm)	序号	1	2	3	4	5	6	7	8	9	10
	实验1	−0.2457	−0.1305	0.01304	0.1010	0.1451	0.1250	0.0247	0.7074	−0.1947	−0.5476
	实验2	−0.2408	−0.1233	0.0211	0.0892	0.1356	0.1157	0.0646	0.6641	−0.1342	−0.6007
	实验3	−0.2664	−0.1407	−0.0069	0.0691	0.1162	0.1125	0.0386	0.6173	−0.1727	−0.6156
	实验4	−0.2481	−0.12055	0.01609	0.0929	0.1473	0.1380	0.0444	0.6985	−0.1676	−0.5741
	实验5	−0.2465	−0.1216	0.0148	0.0976	0.1355	0.1196	0.0151	0.6760	−0.1150	−0.5765
最大线性偏差均值(μm)					0.673
线性度					0.67%

下载: 导出CSV

参考文献(31)

[1]	李东明, 柴长忠, 沈文强, 等. 压电驱动微动平台结构的设计优化和仿真分析[J]. 压电与声光, 2019, 41(3): 396-399.
[2]	Lee H J , Woo S , Park J , et al. Compact compliant parallel XY nano-positioning stage with high dynamic performance, small crosstalk, and small yaw motion[J]. Microsystem Technologies, 2018, 24: 2653-2662.
[3]	郑志月, 施玉书, 高思田, 等. 高精度电容式位移传感器校准方法的研究[J]. 计量学报, 2015, 36(, 1): 14-18. doi: 10.3969/j.issn.1000-1158.2015.01.04
[4]	王芳, 施玉书, 张树, 等. 基于硅晶格常数的纳米线宽计量技术[J]. 计量科学与技术, 2022, 66(4): 13-18, 47.
[5]	Yang C , Li C , Xia F , et al. Charge Controller With Decoupled and Self-Compensating Configurations for Linear Operation of Piezoelectric Actuators in a Wide Bandwidth[J]. IEEE Transactions on Industrial Electronics, 2019, 66(7): 5392-5402.
[6]	Zhu W L , Zhu Z , Shi Y , et al. Design, modeling, nanalysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning[J]. Smart Materials and Structures, 2016, 25(11): 115033.
[7]	Kang B W, Kim J. Design, Fabrication, and Evaluation of Stepper Motors Based on the Piezoelectric Torsional Actuator [J]. IEEE/ASME Transactions on Mechatronics, 2013, 18(6): 1850-1854. doi: 10.1109/TMECH.2013.2269171
[8]	JM Paros, Weisboro L . How to Design Flexure Hinges[J]. Machine Design, 1965, 37(27): 151-157.
[9]	Midha A , Norton T W , Howell L L . On the Nomenclature, Classification, and Abstractions of Compliant Mechanisms[J]. Journal of mechanical design, 1994, 116(1): 270-279.
[10]	范伟, 余晓芬. 压电陶瓷驱动器蠕变特性的研究[J]. 仪器仪表学报, 2006, 27(11): 1383-1386. doi: 10.3321/j.issn:0254-3087.2006.11.005
[11]	陈爽, 彭希锋. 基于激光干涉的位移传感器自动化校准装置[J], 仪表技术与传感器, 2021 (4): 28-33.
[12]	池峰, 朱煜, 张志平, 等. 双频激光干涉测量中的环境补偿技术[J]. 中国激光, 2014, 41(4): 190-196.
[13]	Hu P C, Chang D, Tan J B, et al. Displacement measuring grating interferometer: a review [J]. Front Inform Tech El, 2019, 20(5): 631-654. doi: 10.1631/FITEE.1800708
[14]	Korpelainen V, Lassil A. Calibration of a commercial AFM: traceability for a coordinate system [J]. Meas Sci Technol, 2007, 18(2): 395-403. doi: 10.1088/0957-0233/18/2/S11
[15]	王建波, 殷聪, 石春英, 等. 高功率碘稳频He-Ne激光波长参考源 [J]. 红外与激光工程, 2021, 50(4): 7.
[16]	高思田. 计量型原子力显微镜的研究 [D]. 天津: 天津大学, 2007.
[17]	Dai G L, Koenders L, Pohlenz F, et al. Accurate and traceable calibration of one-dimensional gratings [J]. Meas Sci Technol, 2005, 16(6): 1241-1249. doi: 10.1088/0957-0233/16/6/001
[18]	Dai G L, Pohlenz F, Dziomba T, et al. Accurate and traceable calibration of two-dimensional gratings [J]. Meas Sci Technol, 2007, 18(2): 415-421. doi: 10.1088/0957-0233/18/2/S13
[19]	王国超, 颜树华, 高雷, 等. 光栅干涉位移测量技术发展综述[J]. 激光技术, 2010, 34(5): 661-664. doi: 10.3969/j.issn.1001-3806.2010.05.023
[20]	余茜茜, 施玉书, 张树, 等. 微纳米台阶高度评定方法的比较与分析[J]. 计量科学与技术, 2020(8): 29-33. doi: 10.3969/j.issn.1000-0771.2020.08.06
[21]	李琪, 施玉书, 李伟, 等. 微纳米光学测量的严格耦合波分析方法[J]. 计量科学与技术, 2020(12): 3-6, 11. doi: 10.3969/j.issn.2096-9015.2020.12.01
[22]	Michael M, Petr B, Petr K, et al. The CCL-K11 ongoing key comparison: final report for the year 2010 [J]. Metrologia, 2011, 48(1A): 04001. doi: 10.1088/0026-1394/48/1A/04001
[23]	Didier A, Ignatovich S, Benkler E, et al. 946-nm Nd: YAG digital-locked laser at 1.1×10−16 in 1 s and transfer-locked to a cryogenic silicon cavity [J]. Optics Letters, 2019, 44(7): 1781-1784. doi: 10.1364/OL.44.001781
[24]	Morzynski P, Wcislo P, Ablewski P, et al. Absolute frequency measurement of rubidium 5S-7S two-photon transitions [J]. Optics Letters, 2013, 38(22): 4581-4584. doi: 10.1364/OL.38.004581
[25]	F Cheng, N Jin, F Zhang, et al. A 532 nm molecular iodine optical frequency standard based on modulation transfer spectroscopy[J]. Chinese Physic: B, 2021, 30: 50603-050603. doi: 10.1088/1674-1056/abd754
[26]	周奇, 刘炳锋, 连笑怡, 等. 大范围二维纳米位移台的控制及非线性校准的实验研究[J]. 计量学报, 2018, 39(6): 771-776. doi: 10.3969/j.issn.1000-1158.2018.06.04
[27]	邓晓, 程鑫彬, 林子超, 等. 一种自溯源型光栅干涉精密位移测量系统: CN113566714B[P]. 2021-10-29.
[28]	林子超, 姚玉林, 周通, 等. 基于四维协变量的光栅干涉系统频移理论研究[J]. 计量科学与技术, 2022, 66(11): 3-11, 26. doi: 10.12338/j.issn.2096-9015.2022.0248
[29]	邓晓, 李同保, 程鑫彬. 自溯源光栅标准物质及其应用[J]. 光学精密工程, 2022, 30(21): 2608-2625.
[30]	Deng X , Ma Y , Zhang P , et al. Investigation of shadow effect in laser-focused atomic deposition[J]. APPLIED SURFACE SCIENCE, 2012, 261: 464-469.
[31]	X. Deng, J. Liu, L. Zhu, et al. Natural square ruler at nanoscale[J]. Applied physics express, 2018, 11: 075201. doi: 10.7567/APEX.11.075201