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Development and Metrological Techniques of Nano-Step Height Reference Materials Based on Laser Traceability
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摘要: 随着半导体产业的快速发展，高精度极小尺寸三维纳米制造技术给纳米测量技术提出了更高的要求，急需开发与之相应的纳米几何量标准物质来满足这一日益迫切的需求。为实现我国纳米台阶高度标准物质的可控制备和纳米高度量值的可溯源性，我国自主研发了与国际水平相当的系列纳米台阶高度标准物质，并基于激光波长实现了米定义直接溯源，为支撑多领域技术研究，打破国外垄断，完善我国纳米几何量值传递体系，促进纳米产业的发展做出了重要贡献。通过对国内外纳米台阶高度标准物质的相关研究进行分析对比，就纳米台阶高度标准物质的研制方法及计量技术进行综述，以期为纳米台阶高度标准物质及其他类型的微纳米几何量标准物质的研究提供参考与展望。Abstract: With the rapid growth of the semiconductor industry, the demand for high-precision, small-scale three-dimensional nanomanufacturing techniques has increased, necessitating the development of corresponding nanogeometry reference materials. In response, China has independently developed a series of nano-step height reference materials comparable to international standards, achieving traceability to the meter definition through laser wavelength. This initiative has significantly contributed to supporting technological research across various domains, breaking foreign monopolies, enhancing China's nano-geometry value transfer system, and fostering the nano industry's growth. This paper reviews and compares domestic and international research on nano-step height reference materials, summarizing the fabrication methods and metrology techniques. It aims to provide references and insights for future research on nano-step height reference materials and other micro- and nano-geometry reference materials.
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Key words:
- metrology /
- nano-step height /
- reference materials /
- traceability
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图 1 基于氧化或溅射工艺制备的SiO2纳米台阶
Figure 1. SiO2 nano-steps prepared by oxidation or sputtering process
图 5 毫米级纳米几何结构样板校准装置[13]
Figure 5. Metrological device for calibrating millimeter-range nano-geometric structures
表 1 典型台阶高度标准物质对比
Table 1. Comparison of typical nano-step height reference materials
制造机构 标准物质编号 特征尺寸/nm 扩展不确定度/nm 测量机构 德国FIMS Nano2 7 1.6 德国PTB 20 1.4 70 1.5 美国VLSI SHS-80QC 8 0.5 美国NIST SHS-180QC 18 0.9 SHS-440QC 44 0.7 中国国家纳米科学中心 GBW13952 50 2.8 中国计量科学研究院 GBW13950 100 3.6 中国西安交通大学 GBW13975 5 1.2 GBW13976 10 1.0 GBW13977 20 2.0 GBW13978 40 2.0 
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