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High Precision Measuring Method for Micro Gears Basing on White Light Interferometer
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摘要: 实现精密测量的前提在于被测物理量的准确获取，目前高精度且昂贵的数控齿轮测量仪器得到普遍应用。然而模数小于0.1 mm、直径小于1 mm的微型齿轮由于齿槽宽度过小，传统的接触式测量手段无法测量完整齿廓。光学测量手段也因轮齿遮挡和齿面倾角的限制存在无法获取齿根数据的问题。针对此现状，提出了一种基于白光干涉测量原理的微小齿轮高精度测量方法。根据干涉图样的出现顺序实现对微小齿轮端面倾斜程度的实时监测，确保了齿轮轮廓的提取精度；基于齿轮端面三维点云数据确定齿轮中心，有效提升了齿轮定心精度。重点介绍了面向微小齿轮的白光干涉测量原理、端面调平模型以及齿轮误差计算方法。试验结果表明，该方法能够实现对微小齿轮的高精度测量，为解决微小齿轮的精密测量提供了有效手段。Abstract: The prerequisite for achieving high-precision measurement lies in the accurate acquisition of the physical quantities to be measured, and currently high-precision and expensive CNC gear measuring instruments are commonly used. However, the complete tooth profile of micro gear with modulus less than 0.1mm and diameter less than 1mm cannot be measured by traditional contact measurement due to the narrow space width. Optical methods cannot obtain the data near tooth root due to the shield and inclination. In response to this situation, this paper proposes a high precision measuring method for micro gears basing on white light interferometer. Real time monitoring of the tilting degree of micro gear is achieved by the order of appearance of interference patterns, which ensures the accuracy of profile extraction; The center of the gear is determined by the 3D points of the surface, which can effectively improve the gear centering accuracy. This paper focuses on the principle of white light interferometry measurement for micro gears, the leveling model, and the gear error calculation method. The experimental results show that this method provides an effective means for solving the precision measurement of micro gears.
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Key words:
- metrology /
- white light interferometer /
- micro gears /
- gear measurement /
- gear error /
- surface levelling
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表 2 单项齿廓偏差
Table 2. Profile deviation for each tooth /μm
编号 左齿廓 右齿廓 Fα ffα fHα Fα ffα fHα #1 5.6 8.2 −5.5 3.6 3.1 1.5 #2 3.1 2.9 −0.2 8.3 8.4 0.2 #3 10.2 8.5 −3.7 4.0 4.0 0.1 #4 7.3 7.7 −0.4 5.9 5.1 −1.4 #5 8.6 8.4 −0.3 6.7 5.8 −4.6 #6 4.9 4.4 −1.4 6.5 6.0 −2.1 #7 3.1 3.2 −0.3 7.5 6.5 −1.9 
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