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Overview of the Development of Near-Field Optical Microscopy
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摘要: 半导体芯片制造、超精密加工以及生物医学等领域的探索已经深入纳米尺度，对相应的测量技术提出了更高要求。光学方法以其非接触、无损、快速等优势得到了广泛应用，但传统光学显微镜的分辨率受限于衍射极限。扫描近场光学显微镜基于非辐射场的探测和成像原理，能够突破衍射极限，在超高光学分辨率下进行纳米尺度光学成像。介绍了近场光学显微镜的成像原理，分析了其不同工作方式下的优缺点。针对目前近场光学显微镜发展过程中所聚焦的提高分辨率和信噪比两个重点方向进行了综述。在提高分辨率方面，通过在孔径式近场光学显微镜探针尖端添加纳米天线，基于纳米天线原理突破了探针孔径对于分辨率的限制；利用在光纤尖端包覆金属膜或嵌入金属纳米线等方法，将光纤内的光转化为表面等离激元形式传播至尖端实现高分辨测量；利用一种探针与样品的极小间距模式将光斑压缩，突破散射式近场光学显微镜分辨率受针尖大小的限制，提高了分辨率。在增强针尖处聚焦光场强度、提高信噪比研究方面，通过在探针尖端制备各种纳米结构来激发表面等离激元，避免了远场光直射针尖区域所造成的背景噪声，提高了信噪比；在光纤式探针中通过增加环形光栅等结构来提高表面等离激元转化效率，增加聚焦光场强度，提高了信号强度；采用平台等特殊结构使表面等离激元产生反射共振增强，提高聚焦光场强度。最后，总结并展望了未来近场光学显微镜的发展方向。Abstract: As the semiconductor industry, ultra-precision machining, and biomedical fields delve into the nanoscale, the demand for advanced measurement technologies has heightened. Optical methods, with their non-contact, non-destructive, and rapid properties, have been widely employed, yet the resolution of traditional optical microscopes is bounded by the diffraction limit. Scanning Near-Field Optical Microscopy (SNOM), operating on the principles of non-radiative field detection and imaging, overcomes this limit to facilitate nanoscale optical imaging with ultra-high resolution. This review introduces the imaging principles of near-field optical microscopy and analyzes its advantages and disadvantages across various operational modes. It then delves into two crucial aspects of SNOM's ongoing development: enhancing resolution and signal-to-noise ratio (SNR). In terms of improving resolution, approaches like adding nano-antennas to the tips of aperture-type SNOM probes have been explored to break through the probe aperture's resolution constraint. Techniques such as coating optical fibers with metal films or embedding metal nanowires to convert light into surface plasmon forms for high-resolution measurements are discussed. Additionally, the use of a minimal gap mode between the probe and sample to compress the light spot, thereby exceeding the resolution limitations of scattering-type SNOMs, is examined. The review also addresses strategies to augment the light field intensity at the probe tip and improve SNR. These include fabricating various nanostructures at the probe tip to excite surface plasmons, thereby mitigating background noise caused by direct far-field light, and enhancing the SNR. Innovations in fiber-optic probes, such as the inclusion of ring gratings to improve surface plasmon conversion efficiency, are explored to increase the focused light field's intensity and signal strength. The utilization of special structures like platforms to induce surface plasmon reflective resonance enhancement, thus increasing the focused light field's intensity, is also discussed. The article concludes by summarizing the state of near-field optical microscopy and projecting its future development trajectory.
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Key words:
- metrology /
- near-field optical microscopy /
- resolution /
- signal-to-noise ratio /
- surface plasmon /
- nano-focusing
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图 3 A-SNOM不同工作模式
注：a)照明模式；b)收集模式；c)照明-收集模式；d)有孔探针电镜图。
Figure 3. A-SNOM different working modes
图 6 光纤光子晶体结合纳米天线
注：（a）等离激元天线结构；（b）纳米天线细节图；（c）诱导沉积过程图。
Figure 6. Nano-antennas combined with fiber optic photonic crystals
图 8 光纤包覆纳米线激发表面等离激元方法
Figure 8. Method of surface plasmon excitation using fiber coated with nanowires
图 9 锥形光纤结合纳米线激发表面等离激元方法
Figure 9. Surface plasmon excitation method using conical fiber combined with nanowires
图 11 光栅激发表面等离激元示意图
Figure 11. Schematic of surface plasmon excitation by an optical grating
图 13 光栅耦合器及单壁碳纳米管测试结果
Figure 13. Test results of single-wall carbon nanotubes using a grating coupler
图 15 纳米线与纳米颗粒结构及测试结果
Figure 15. Nanowires and nanoparticle structures and test results
图 17 小孔衍射激发表面等离激元及聚焦过程
Figure 17. Surface plasmons excitation and focusing by aperture diffraction process
图 18 光纤探针尖端金字塔结构
注：(a)方形环；(b)圆形环；(c)椭圆环。
Figure 18. Pyramid structure at the tip of the optical fiber probe
图 19 波导模式与等离激元模式耦合转化过程
Figure 19. Coupling and transformation process between waveguide and plasmon modes
图 21 半环非对称离激元光纤探针及聚焦机理
Figure 21. Semi-ring asymmetric plasmon fiber probe and its focusing mechanism
图 23 平台基光纤探针几何模型及干涉聚焦机理
Figure 23. Geometric model and interferometric focusing mechanism of a platform-based fiber probe
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