Comparison Study on Straightness Detection of Two Mirror Sets by Laser Interferometer

ZHAO Hong; YAN Haoming; LIU Ying

doi:10.12338/j.issn.2096-9015.2021.0645

Volume 66 Issue 3

Mar. 2022

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ZHAO Hong, YAN Haoming, LIU Ying. Comparison Study on Straightness Detection of Two Mirror Sets by Laser Interferometer[J]. Metrology Science and Technology, 2022, 66(3): 54-57, 29. doi: 10.12338/j.issn.2096-9015.2021.0645

Citation:

ZHAO Hong, YAN Haoming, LIU Ying. Comparison Study on Straightness Detection of Two Mirror Sets by Laser Interferometer[J]. Metrology Science and Technology, 2022, 66(3): 54-57, 29. doi: 10.12338/j.issn.2096-9015.2021.0645

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Comparison Study on Straightness Detection of Two Mirror Sets by Laser Interferometer

doi: 10.12338/j.issn.2096-9015.2021.0645

Shenyang Machine Tool (Group) Co., Ltd. Design and Research Institute, Shenyang 110042, China

Accepted Date: 2022-02-20

Available Online: 2022-02-23

Publish Date: 2022-03-08

Abstract

Abstract

This paper introduces the measurement principle, detection methods, and precautions of using the laser interferometer straightness mirror set and angular mirror set to detect straightness, and focuses on the comparative analysis of the two detection methods. Relying on the detection data, this paper analyzed the differences in the accuracy, advantages, and application environments of the two detection methods.
- laser interferometer,
- straightness mirror set,
- angular mirror set,
- comparison

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References(12)

References

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