Study on Reference Materials of Copper Content in Aluminum-Copper Thin Films

ZHANG Ran; CUI Lei; WANG Yalei; ZHANG Yi; TAO Xingfu; LI Xu

doi:10.12338/j.issn.2096-9015.2023.0096

Volume 67 Issue 3

Mar. 2023

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Article Navigation > Metrology Science and Technology > 2023 > 67(3): 72-79

ZHANG Ran, CUI Lei, WANG Yalei, ZHANG Yi, TAO Xingfu, LI Xu. Study on Reference Materials of Copper Content in Aluminum-Copper Thin Films[J]. Metrology Science and Technology, 2023, 67(3): 72-79. doi: 10.12338/j.issn.2096-9015.2023.0096

Citation:

ZHANG Ran, CUI Lei, WANG Yalei, ZHANG Yi, TAO Xingfu, LI Xu. Study on Reference Materials of Copper Content in Aluminum-Copper Thin Films[J]. Metrology Science and Technology, 2023, 67(3): 72-79. doi: 10.12338/j.issn.2096-9015.2023.0096

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Study on Reference Materials of Copper Content in Aluminum-Copper Thin Films

doi: 10.12338/j.issn.2096-9015.2023.0096

ZHANG Ran^{1, 2
,},
CUI Lei³,
WANG Yalei³,
ZHANG Yi⁴,
TAO Xingfu²,
LI Xu^{2
,
,}

1.
Shenyang University of Chemical Technology, Shenyang 110142, China
2.
National Institute of Metrology, Beijing 100029, China
3.
Nanjing Institute of Measurement and Testing Technology, Nanjing 210049, China
4.
Henan University of Science and Technology, Luoyang 471023, China

Received Date: 2023-03-30
Accepted Date: 2023-04-10
Rev Recd Date: 2023-04-28

Available Online: 2023-05-10

Publish Date: 2023-03-18

Abstract

Abstract

An aluminum-copper (Al-Cu) thin film reference material for copper content, intended for the calibration of X-ray energy/wave spectrometers, was developed in this study. The uniformity and stability of the developed Al-Cu thin film reference material were evaluated using an electronic probe. An inductively coupled plasma emission spectrometer (ICP-OES) was employed to determine the copper content (wt%) of the reference material. The sources of uncertainty for the copper content in the Al-Cu film standard with a nominal value of 49.5% were examined, and the uncertainty of the reference material was evaluated. The findings indicate that the reference material displays good uniformity and stability. The copper content standard value of the reference material was found to be 49.46 wt%, with an extended uncertainty of 0.98 wt% (k=2). The developed Al-Cu thin film copper content reference material for X-ray energy/wave spectrometer calibration meets the calibration requirements for quantitative analyses conducted with X-ray energy/wave spectrometers. It fills a domestic gap in reference materials for X-ray energy/wave spectrometer calibration and provides a measurement assurance and technical support for the quantitative analysis of copper content in China's scientific research industry.
- metrology,
- copper,
- X-ray energy/wave spectrometers,
- reference material,
- calibration,
- uncertainty

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References(30)

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