Design and Simulation of a Self-Traceable MOEMS Accelerometer Oscillator

CHANG Zhikun; ZHANG Wanyi; SHEN Xiaoyu; MU Qun; HAN Xiaoling; SONG Song; NIU Pengfei; DENG Xiao; CHENG Xinbin

doi:10.12338/j.issn.2096-9015.2023.0109

Volume 67 Issue 6

Jun. 2023

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Article Navigation > Metrology Science and Technology > 2023 > 67(6): 9-15, 43

CHANG Zhikun, ZHANG Wanyi, SHEN Xiaoyu, MU Qun, HAN Xiaoling, SONG Song, NIU Pengfei, DENG Xiao, CHENG Xinbin. Design and Simulation of a Self-Traceable MOEMS Accelerometer Oscillator[J]. Metrology Science and Technology, 2023, 67(6): 9-15, 43. doi: 10.12338/j.issn.2096-9015.2023.0109

Citation:

CHANG Zhikun, ZHANG Wanyi, SHEN Xiaoyu, MU Qun, HAN Xiaoling, SONG Song, NIU Pengfei, DENG Xiao, CHENG Xinbin. Design and Simulation of a Self-Traceable MOEMS Accelerometer Oscillator[J]. Metrology Science and Technology, 2023, 67(6): 9-15, 43. doi: 10.12338/j.issn.2096-9015.2023.0109

Citation:

CHANG Zhikun, ZHANG Wanyi, SHEN Xiaoyu, MU Qun, HAN Xiaoling, SONG Song, NIU Pengfei, DENG Xiao, CHENG Xinbin. Design and Simulation of a Self-Traceable MOEMS Accelerometer Oscillator[J]. Metrology Science and Technology, 2023, 67(6): 9-15, 43. doi: 10.12338/j.issn.2096-9015.2023.0109

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Design and Simulation of a Self-Traceable MOEMS Accelerometer Oscillator

doi: 10.12338/j.issn.2096-9015.2023.0109

CHANG Zhikun^{1, 2, 3, 4, 5
,},
ZHANG Wanyi^{1, 2, 3, 4, 5},
SHEN Xiaoyu^{1, 2, 3, 4, 5},
MU Qun^{1, 2, 3, 4, 5},
HAN Xiaoling⁶,
SONG Song⁷,
NIU Pengfei⁸,
DENG Xiao^{1, 2, 3, 4, 5
,
,},
CHENG Xinbin^{1, 2, 3, 4, 5}

1.
Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, China
2.
MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai 200092, China
3.
Shanghai Frontiers Science Center of Digital Optics, Shanghai 200092, China
4.
Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, Shanghai 200092, China
5.
School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
6.
School of Physical Science and Technology, Soochow University, Suzhou 215000, China
7.
Faculty of Fundamental Education, Zhejiang University of Water Resources and Electric Power, Hangzhou 310018, China
8.
State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China

Received Date: 2023-04-14
Accepted Date: 2023-05-08
Rev Recd Date: 2023-05-11

Available Online: 2023-07-27

Publish Date: 2023-06-18

Abstract

Abstract

MOEMS accelerometers are emerging as a pivotal trend in acceleration sensor technology. The accuracy of their measurements predominantly hinges on optical displacement detection methods. The coherent design and the congruence of the oscillator are pivotal for maximizing measurement efficacy. This study introduces a super-precise displacement measurement method, the self-traceable grating interferometry, marked by its direct traceability, high precision, and miniaturization, aligning seamlessly with the displacement measurement prerequisites of MOEMS accelerometers. Leveraging the properties of the self-traceable grating interferometry, we design, calculate, and simulate the oscillator of a self-traceable MOEMS accelerometer. Through the mechanical theory model, we deduced the stiffness and natural frequency of the oscillator. Utilizing the COMSOL software, simulations were run on its resonant modes, axial sensitivities, and stress distributions. Our design achievements include a oscillator with a remarkable displacement sensitivity reaching 10.01 μm/g and exhibiting minimal cross-coupling. Such advancements underscore the value of this research in the realm of direct traceability and the refinement of high-precision accelerometer measurement paradigms.
- metrology,
- MOEMS accelerometer,
- self-traceable grating interferometry,
- oscillator,
- COMSOL finite element simulation,
- natural frequency,
- sensitivity,
- stress distribution

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References(30)

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