Study on the Calibration Method of Nano-Positioning Stages Using Grating Interferometers

LIU Liqin; GUAN Yuqing; ZOU Wenzhe; GUO Chuangwei; ZHANG Yujie; XU Ruishu; FU Yunxia; LEI Lihua

doi:10.12338/j.issn.2096-9015.2023.0114

Volume 67 Issue 6

Jun. 2023

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Article Navigation > Metrology Science and Technology > 2023 > 67(6): 37-43

LIU Liqin, GUAN Yuqing, ZOU Wenzhe, GUO Chuangwei, ZHANG Yujie, XU Ruishu, FU Yunxia, LEI Lihua. Study on the Calibration Method of Nano-Positioning Stages Using Grating Interferometers[J]. Metrology Science and Technology, 2023, 67(6): 37-43. doi: 10.12338/j.issn.2096-9015.2023.0114

Citation:

LIU Liqin, GUAN Yuqing, ZOU Wenzhe, GUO Chuangwei, ZHANG Yujie, XU Ruishu, FU Yunxia, LEI Lihua. Study on the Calibration Method of Nano-Positioning Stages Using Grating Interferometers[J]. Metrology Science and Technology, 2023, 67(6): 37-43. doi: 10.12338/j.issn.2096-9015.2023.0114

Citation:

LIU Liqin, GUAN Yuqing, ZOU Wenzhe, GUO Chuangwei, ZHANG Yujie, XU Ruishu, FU Yunxia, LEI Lihua. Study on the Calibration Method of Nano-Positioning Stages Using Grating Interferometers[J]. Metrology Science and Technology, 2023, 67(6): 37-43. doi: 10.12338/j.issn.2096-9015.2023.0114

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Study on the Calibration Method of Nano-Positioning Stages Using Grating Interferometers

doi: 10.12338/j.issn.2096-9015.2023.0114

LIU Liqin^{1, 2
,},
GUAN Yuqing^{1, 2},
ZOU Wenzhe^{1, 2},
GUO Chuangwei¹,
ZHANG Yujie¹,
XU Ruishu¹,
FU Yunxia^{1, 2},
LEI Lihua^{1, 2
,
,}

1.
Shanghai Institute of Measurement and Testing Technology, Shanghai, 201203, China
2.
Shanghai Key Laboratory of Online Test and Control Technology, Shanghai, 201203, China

Received Date: 2023-04-21
Accepted Date: 2023-08-01
Rev Recd Date: 2023-07-27

Available Online: 2023-08-23

Publish Date: 2023-06-18

Abstract

Abstract

As the critical dimensions in integrated circuit manufacturing approach the 5nm node, the demand for the industrialization of integrated circuit testing equipment has surged. The nano-positioning stage, a pivotal component in semiconductor manufacturing, ultra-precision machining, and precision instrument manufacturing, is experiencing increasingly stringent demands for its repetitive positioning accuracy and linearity. The grating interferometer, which leverages the pitch of the grating as a reference material for measurement, showcases remarkable environmental resilience and superior stability. This makes the grating interferometer an emerging trend in the industrialization of macro-nano measurement equipment. This study presents a calibration method for the nano-positioning stage using a grating interferometer. The feasibility of this method is confirmed through experimental validations. Furthermore, an in-depth analysis of the measurement uncertainty and traceability chain is conducted, highlighting the robustness and shortened traceability path of the proposed calibration approach.
- metrology,
- grating interferometer,
- standard grating,
- displacement calibration,
- nano-positioning stage

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References(31)

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