Advances and Applications in High-Precision Surface Coordinate Measurement Methods

DIAO Xiaofei; FAN Xinrui; KANG Yanhui

doi:10.12338/j.issn.2096-9015.2023.0339

Volume 68 Issue 2

Feb. 2024

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DIAO Xiaofei, FAN Xinrui, KANG Yanhui. Advances and Applications in High-Precision Surface Coordinate Measurement Methods[J]. Metrology Science and Technology, 2024, 68(2): 101-110. doi: 10.12338/j.issn.2096-9015.2023.0339

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DIAO Xiaofei, FAN Xinrui, KANG Yanhui. Advances and Applications in High-Precision Surface Coordinate Measurement Methods[J]. Metrology Science and Technology, 2024, 68(2): 101-110. doi: 10.12338/j.issn.2096-9015.2023.0339

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Advances and Applications in High-Precision Surface Coordinate Measurement Methods

doi: 10.12338/j.issn.2096-9015.2023.0339

1.
National Institute of Metrology, Beijing 100029, China
2.
Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China

Received Date: 2023-12-08
Accepted Date: 2023-12-20
Rev Recd Date: 2023-12-21

Available Online: 2024-01-06

Publish Date: 2024-02-18

Abstract

Abstract

The rapid evolution in optical component processing technology has notably enhanced the application of complex surface optical elements in various domains, including aviation, aerospace, and extreme ultraviolet lithography. These advancements have brought revolutionary changes in optical design and present substantial challenges in processing technology due to precision requirements. Consequently, there is an increasing demand for inspecting profiles and establishing standards in the metrology of freeform optical surfaces. This paper provides an extensive review of the progress and applications of high-precision surface form measurement methods for complex surface optical components. It primarily focuses on the widely applicable coordinate point scanning measurement methods, elaborating on their historical development, research progress, applicability, advantages, and limitations. The paper synthesizes advanced domestic and international measurement techniques and proposes a novel standard aspherical surface measurement device, integrating a miniature interferometric probe. This innovation aims to address the challenges of uniformity and traceability in surface measurement instruments, providing a practical approach for high-precision measurements of complex surfaces. Additionally, the paper delineates the key research directions and potential development trends in the field of complex surface measurement, emphasizing the significance of further advancements in this area.
- metrology,
- surface form inspection,
- interferometric measurement,
- coordinate scanning,
- standard device,
- inspection technology

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References(83)

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