The Calibration Method of Transmission Electron Microscope

LI Xu; ZHANG Ran; ZHANG Mingyu; GENG Yongfeng; ZHANG Yi; GAO Huifang; REN Lingling

doi:10.3969/j.issn.2096-9015.2021.04.08

Volume 65 Issue 4

Apr. 2021

Turn off MathJax

Article Contents

Article Navigation > Metrology Science and Technology > 2021 > 65(4): 40-44, 18

LI Xu, ZHANG Ran, ZHANG Mingyu, GENG Yongfeng, ZHANG Yi, GAO Huifang, REN Lingling. The Calibration Method of Transmission Electron Microscope[J]. Metrology Science and Technology, 2021, 65(4): 40-44, 18. doi: 10.3969/j.issn.2096-9015.2021.04.08

Citation:

LI Xu, ZHANG Ran, ZHANG Mingyu, GENG Yongfeng, ZHANG Yi, GAO Huifang, REN Lingling. The Calibration Method of Transmission Electron Microscope[J]. Metrology Science and Technology, 2021, 65(4): 40-44, 18. doi: 10.3969/j.issn.2096-9015.2021.04.08

Citation:

PDF( 1006 KB)

The Calibration Method of Transmission Electron Microscope

doi: 10.3969/j.issn.2096-9015.2021.04.08

1.
National Institute of Metrology of China, Beijing 100029, China
2.
Shengyang University of Chemical Technology, Shengyang 110142, China
3.
Henan University of Science and Technology, Luoyang 471023, China

Available Online: 2021-04-15
Publish Date: 2021-04-15

Abstract

Abstract

In this paper, reference materials for transmission electron microscope (TEM) magnification calibration and their traceability were studied, and the TEM magnification and contamination/drift rate calibration methods and uncertainty evaluation of calibration results were carried out. This study can provide an accurate and reliable calibration method for measuring the results of TEM in scientific research and industrial applications.
- transmission electron microscope,
- magnification,
- reference material,
- calibration,
- uncertainty

FullText(HTML)

References(12)

References

[1]	刘安生, 邵贝羚, 安生, 等. 二次电子成分衬度成像方法在异质结半导体材料和器件的微结构研究中的应用[J]. 稀有金属, 1998, 022(006): 401-405.
[2]	王荣明. 电子出射波重构的基本原理和应用[J]. 电子显微学报, 2006, 025(001): 9-14.
[3]	Cullis A G, Maher D M. Topographical contrast in the transmission electron microscope[J]. Ultramicroscopy, 1975, 1(2): 97-112. doi: 10.1016/S0304-3991(75)80012-X
[4]	Mccartney M R, Kruit P, Buist A H, et al. Differential phase contrast in TEM[J]. Ultramicroscopy, 1996, 65(3-4): 179-186. doi: 10.1016/S0304-3991(96)00068-X
[5]	李斗星. 原子分辨率的原子序数衬度成像及应用[J]. 电子显微学报, 2005, 024(004): 245.
[6]	Kadavanich A V, Kippeny T C, Erwin M M, et al. Sublattice Resolution Structural and Chemical Analysis of Individual CdSe Nanocrystals Using Atomic Number Contrast Scanning Transmission Electron Microscopy and Electron Energy Loss Spectroscopy[J]. The Journal of Physical Chemistry B, 2001, 105(2): 361-369. doi: 10.1021/jp002974j
[7]	齐笑迎, 贺蒙. 高角环形暗场成像方法测定负载型纳米贵金属催化剂的粒径[J]. 电子显微学报2011, 030(003): 191-194.
[8]	Anderson S C, Birkeland C R, Anstis G R, et al. An approach to quantitative compositional profiling at near-atomic resolution using high-angle annular dark field imaging[J]. Ultramicroscopy, 1997, 69(2): 83-103. doi: 10.1016/S0304-3991(97)00041-7
[9]	Mccaffrey J P, Baribeau J M. A transmission electron microscope (TEM) calibration standard sample for all magnification, camera constant, and image/diffraction pattern rotation calibrations[J]. Microscopy Research and Technique, 1995, 32(5): 449-454. doi: 10.1002/jemt.1070320507
[10]	周剑雄, 陈振宇. 用于扫描电镜图像放大倍率校准的三个微米级栅网图形标准样板的研究[J]. 电子显微学报, 2005, 024(003): 185-191.
[11]	钱进, 石春英, 谭慧萍, 等. 利用一维光栅标样校准扫描电子显微镜方法的研究[J]. 计量学报, 2010, 31(4): 299-302. doi: 10.3969/j.issn.1000-1158.2010.04.03
[12]	Grogger W, Schaffer B, Krishnan K M, et al. Energy-filtering TEM at high magnification: Spatial resolution and detection limits[J]. Ultramicroscopy, 2003, 96(3-4): 481-489. doi: 10.1016/S0304-3991(03)00110-4