基于光波偏振态变换的角度测量法研究

    Research on Angle Measurement Based on the Transformation of Optical Wave Polarization States

    • 摘要: 角度测量是几何量计量领域的重要参量之一,为了丰富光学测角技术,提出了一种基于光波偏振态变换的角度测量法。理论方面,构建“前静后动”和“前动后静”两种测量模式,重点探讨在两种测量模式下激光圆斑的圆心侧移量与角度量之间的数学关系,通过比值法和MATLAB仿真比较了两种方案的光学放大特性,证实“前动后静”模式具备更优的角度放大特性和更高的分辨率;实验验证方面,在测角分辨力为0.1″、面阵CCD最小像元为3.2μm情况下分配三段光路的距离,采用“前动后静”测量模式对800mm长的导轨表面起伏状况进行测量,实时采集光斑位移数据,结合公式得到导轨表面累计高度差,并将此测量结果与自准直仪测得数据进行比较。实验结果显示,所提方法与自准直仪法的测量结果具有相同的累计高度差趋势,角度的测量不确定度为6.67″,验证了所提方法的可行性,为开发抗环境干扰的新型光学测角系统提供了参考。

       

      Abstract: Angle measurement is one of the important parameters in the field of geometric quantity measurement. To enrich optical angle measurement technology, an angle measurement method based on the transformation of light wave polarization state is proposed. In terms of theory, two measurement modes, “static front, dynamic back” and “dynamic front, static back”, are constructed. The mathematical relationship between the center displacement of the laser circular spot and the angle measurement in the two measurement modes is mainly discussed. The optical amplification characteristics of the two schemes are compared through the ratio method and MATLAB simulation, and it is confirmed that the “dynamic front, static back” mode has better angle amplification characteristics and higher resolution. In the experimental verification aspect, the distance of three optical paths is allocated under the angle measurement resolution of 0.1" and the minimum pixel of the area array CCD of 3.2 μm. The “dynamic front, static back” measurement mode is used to measure the surface undulation of the 800mm long guide rail, and the displacement data of the light spot is collected in real time. The cumulative height difference of the guide rail surface is obtained by combining the formula, and this measurement result is compared with the data obtained by the autocollimator. The experimental results show that the measurement results of the proposed method have the same cumulative height difference trend as the autocollimator method, and the measurement uncertainty of the angle is 6.67". This verifies the feasibility of the proposed method and provides a reference for the development of a new type of anti-environment interference optical angle measurement system.

       

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