Abstract: Aiming at the problem of balancing the cost and accuracy in calibration of industrial robots, a low-cost three-dimensional high-precision contact self-calibration system for industrial robots was developed. The three-dimensional calibrator is installed in the end position of the robot (TCP). Using three orthogonal high-precision position sensors, the D-H parameters of industrial robots can be calibrated online with low cost and high precision by the calibration algorithm of D-H parameters of industrial machines and precise iterative measurement of a special four ball calibration table. A comparison with a laser tracker showed that the maximum E_n value of each measurement point was 0.63 and the comparison result was satisfactory.