Abstract: To solve the problem of on-site calibration of mechanical accuracy of some non-standard equipment with geometric parameters, a set of follow-up calibration device integrating displacement and angle was designed, and the grating signal acquisition and measurement system design and software development were carried out. Through a large number of field comparative tests under different conditions, technical problems such as rotational eccentricity were solved, and the reliability of the system and the effectiveness of the device were verified. Through the research of geometric parameter follow-up calibration device, the application of follow-up calibration technology in geometric parameter equipment calibration is realized.