铝铜薄膜铜元素含量标准物质研究

    Study on Reference Materials of Copper Content in Aluminum-Copper Thin Films

    • 摘要: 研制了一种X射线能谱仪/波谱仪校准用铝铜薄膜铜元素含量标准物质,使用电子探针对研制的铝铜薄膜铜元素含量标准物质进行均匀性、稳定性检验,使用电感耦合等离子体发射光谱仪(ICP-OES)对标准物质的铜元素含量(wt%)进行了定值,分析了名义值为49.5%的铝铜薄膜标准物质铜元素含量的不确定度来源,评定了标准物质的不确定度。研究结果表明:标准物质样品具有良好的均匀性和稳定性,标准物质的铜元素含量标准值为49.46 wt%,扩展不确定度为0.98 wt%(k=2)。研制的X射线能谱仪/波谱仪校准用铝铜薄膜铜元素含量标准物质,满足了X射线能谱仪/波谱仪定量分析过程中的校准需求,填补了X射线能谱仪/波谱仪校准用标准物质的国内空白,为我国科研产业的铜元素含量定量分析提供了量值保障和技术支撑。

       

      Abstract: An aluminum-copper (Al-Cu) thin film reference material for copper content, intended for the calibration of X-ray energy/wave spectrometers, was developed in this study. The uniformity and stability of the developed Al-Cu thin film reference material were evaluated using an electronic probe. An inductively coupled plasma emission spectrometer (ICP-OES) was employed to determine the copper content (wt%) of the reference material. The sources of uncertainty for the copper content in the Al-Cu film standard with a nominal value of 49.5% were examined, and the uncertainty of the reference material was evaluated. The findings indicate that the reference material displays good uniformity and stability. The copper content standard value of the reference material was found to be 49.46 wt%, with an extended uncertainty of 0.98 wt% (k=2). The developed Al-Cu thin film copper content reference material for X-ray energy/wave spectrometer calibration meets the calibration requirements for quantitative analyses conducted with X-ray energy/wave spectrometers. It fills a domestic gap in reference materials for X-ray energy/wave spectrometer calibration and provides a measurement assurance and technical support for the quantitative analysis of copper content in China's scientific research industry.

       

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