Abstract: Micro-newton force measurement technology, extensively employed in the domains of space exploration, bio-materials analysis, and micro-nano manufacturing, plays a pivotal role. This study presents a device constructed based on the principle of electrostatic force balance, aimed at measuring micro-newton force values. Addressing the issues encountered in preliminary research, such as excessive stiffness in the vertical direction and significant alignment error of cylindrical capacitors, structural optimization of quadrilateral flexible pivots was undertaken to diminish system stiffness vertically, thereby enhancing the force resolution of the electrostatic force balance. Additionally, calibration of the concentricity of the inner and outer electrodes was achieved based on the capacitance characteristics of cylindrical capacitors. Experimental assessments revealed that the devised micro-newton force measurement device adeptly confines the measurement uncertainty of 100 μN force values to the E-5 level. The outcomes of this research are poised to significantly contribute to the establishment of micro-newton force measurement standard devices and further research on micro-newton force measurement methodologies.