Abstract: The 26th General Conference on Weights and Measures (CGPM) in 2018 recommended the silicon 220 lattice spacing as one of the realization methods for the definition of the metre, to meet the demand for atomic-level accuracy measurements as physical dimensions continue to shrink. Currently, the main instruments that can directly characterize the silicon lattice include X-ray diffractometers (XRD), transmission electron microscopes (TEM), and scanning probe microscopes (SPM). This paper briefly introduces the domestic and international application and development status of silicon lattice constant traceability methods under different measurement principles. Focusing on scanning probe microscopy, according to the measurement principles of different types of scanning probe microscopes, the spatial metrological calibration and application prospects of scanning tunneling microscopes (STM), atomic force microscopes (AFM), and qPlus atomic force microscopes (qPlus-AFM) at the atomic scale in both lateral and vertical dimensions are summarized. As an important part of the SI unit redefinition, conducting metrological research on scanning probe microscopy techniques based on the silicon lattice constant will help establish a new generation of nanometrological systems in China and enhance China's international status and voice in the field of nanometrology.