用于微纳米位移定位校准的双溯源链路计量标准装置的建立

    Establishment of a Dual Traceability Chain Metrology Standard Device for Micro-Nano Displacement Positioning Calibration

    • 摘要: 微纳米定位技术是前沿科学和工程技术领域的关键技术之一,其中微纳米定位平台的位移校准在精密测量领域中占据重要地位,中国计量科学研究院研制了用于微纳米位移定位校准的双溯源链路计量标准装置,并建立为我国计量标准。该装置包含激光干涉法微纳米位移定位校准装置与光栅衍射干涉法微纳米位移定位校准装置,其中激光干涉法校准装置通过六自由度激光干涉校准系统实现了纳米微位移平台直接全面校准,在该溯源链路中量值通过激光干涉仪溯源至米定义的波长基准;光栅衍射干涉法校准装置以一维纳米光栅标准物质为核心,在该溯源链路中量值通过光栅栅距溯源至米定义的波长基准。双溯源链路计量标准装置满足了微纳米定位校准的多样化应用需求并增强溯源方式的全面性和可靠性,保证了集成电路领域光刻等微纳米级位移的高精度测量、航空航天工业关键部件的精密装配测量,该计量装置的建立为我国微纳米定位技术的发展提供了重要的技术支撑。

       

      Abstract: Micro-nano positioning technology is one of the key technologies in the field of cutting-edge science and engineering, with displacement calibration of micro-nano positioning platforms playing a crucial role in precision measurement. The National Institute of Metrology, China, has developed a dual traceability chain metrology standard device for micro-nano displacement positioning calibration and established it as a national metrology standard. The device comprises a laser interferometry-based micro-nano displacement positioning calibration system and a grating diffraction interferometry-based micro-nano displacement positioning calibration system. The laser interferometry calibration system achieves direct and comprehensive calibration of the micro-nano displacement platform through a six-degree-of-freedom laser interferometer calibration setup. In this traceability chain, the measurement values are traced back to the wavelength standard defined by the meter through the laser interferometer. The grating diffraction interferometry calibration system utilizes a one-dimensional nano-grating reference material, and in its traceability chain, the measurement values are indirectly traced back to the wavelength standard defined by the meter through the grating pitch. The dual traceability chain metrology standard device satisfies the diverse application requirements of micro-nano positioning calibration and enhances the comprehensiveness and reliability of the traceability chain. It ensures high-precision measurements of micro-nano-level displacements in fields such as integrated circuit photolithography and precision assembly of key components in aerospace industries. The establishment of this metrology standard device provides significant technical support for the development of micro-nano positioning technology in China.

       

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