Abstract:
As a critical core technology supporting the development of aerospace, industrial measurement, and large scientific facilities, advanced equipment manufacturing relies heavily on high-precision, large-scale absolute distance measurement as a fundamental technical requirement. Optical frequency scanning interferometry technology, known for its large measurement range, high precision, and the ability to measure uncooperative targets, effectively meets the measurement and monitoring needs of large-scale advanced equipment manufacturing. However, achieving high-precision optical frequency scanning interferometry necessitates a large bandwidth frequency modulation capability at the nanometer level, which requires resolving key issues such as frequency modulation nonlinearity and traceability references for optical frequency scanning. Starting with an overview of optical frequency scanning interferometry technology, this paper systematically reviews the research status of frequency modulation nonlinearity correction methods and optical frequency scanning traceability reference technologies, both domestically and internationally. It also summarizes the research progress made by the National Institute of Metrology of China in the area of multi-channel optical frequency scanning interferometry active guiding ranging technology. This includes studies on the underlying principles and methods, the development of ranging systems, and the testing of technical performance metrics. The paper provides a robust theoretical foundation and practical guidance for the further application of this technology in large-scale metrology.