Abstract: The strain field measurement on the micro/nano scale is one of the most important research topics of experimental mechanics. Most existing research ignored the influences of the speckle image quality, the systematic random error, calculation processes and other factors on the accuracy of strain field measurement. In order to overcome the above challenges, the implementation of the Digital Image Correlation (DIC) technique based on the Scanning Probe Microscope (SPM) was investigated, and scientific evaluation criteria and an improved displacement field calculation method were proposed. Experimental results showed that the estimation performance of the displacement field was significantly enhanced in terms of accuracy control.