基于激光扫描法的光阑有效面积计量技术研究

刘志伟; 刘文德; 许宁; 林永杰; 林延东; 徐楠

doi:10.12338/j.issn.2096-9015.2020.9046

基于激光扫描法的光阑有效面积计量技术研究

doi: 10.12338/j.issn.2096-9015.2020.9046

中国计量科学研究院，北京 100029

基金项目: 国家重点研发计划项目资助（2018YFB0504601）

详细信息

作者简介:
刘志伟（1997-），中国计量科学研究院研究生，研究方向：太阳总辐照度计量，邮箱：liuzhw@nim.ac.cn

通讯作者:
徐楠（1982-），中国计量科学研究院副研究员，研究方向：低温辐射计与光纤光学计量，邮箱：xunan@nim.ac.cn

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出版历程
- 网络出版日期: 2021-05-08
- 刊出日期: 2021-07-08

Research on Measurement of the Effective Area of Apertures Based on a Laser Scanning Method

摘要

摘要: 光阑作为限制光束通光面积的常用器件，在光学与光辐射测量中具有广泛的应用。如何准确地测量光阑面积，世界各国计量机构进行了大量的研究。本文首先介绍了激光二维扫描方法，建立了光阑有效通光面积的测量装置，利用此装置测量了一个直径为8 mm的光阑的有效通光面积。本文对有效面积测量的各项不确定度分量进行了分析，包括激光功率稳定性、光阑边缘附近的信号波动，以及积分球散斑和内壁均匀性等。实验表明光阑有效面积测量结果的相对扩展不确定度达到1.8×10⁻⁴（k=2）。
- 光阑有效面积 /
- 辐照度 /
- 激光扫描法 /
- 计量学 /
- 测量不确定度
Abstract: As a common device to limit the passing-through area of a light beam, apertures are widely used in optics and optical radiation measurement. In order to precisely measure the aperture area, metrology institutes around the world have done a lot of research. In this paper, an effective-aperture-area measurement facility based on a two-dimensional scanning method is established and the area of a circular aperture with a diameter of 8 mm is measured using the facility. The factors affecting the area measurement are analyzed, including the stability of the laser power, the signal fluctuation near the edge of the aperture, the speckle of the integrating sphere, and the uniformity of the inner wall. The experimental results showed that the relative extended uncertainty of the measured effective aperture area was 1.8×10⁻⁴ (k=2).
- effective aperture area /
- irradiance /
- laser scanning /
- metrology /
- measurement uncertainty

HTML全文

图 1 有效通光面积法基本原理图

Figure 1. Schematic diagram of the effective area method

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图 2 采用激光扫描方式的原理图

Figure 2. Schematic diagram of the laser scanning method

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图 3 测量装置光路图

Figure 3. Schematic of the measuring device

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图 4 完整时间稳定性

Figure 4. Total time stability

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图 5 光阑扫描信号的三维分布图

Figure 5. Three-dimensional distribution of the scanning signal

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图 6 探测器接收功率各点重复性

Figure 6. Repeatability of the measurements

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图 7 光阑面积测量结果对比

Figure 7. Comparison of measurement results of the aperture area

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表 1 比对结果

Table 1. Results of the comparison

机构	5 mm铜制光阑		5 mm铝青铜制光阑
机构	相对误差	相对不确定度	相对误差	相对不确定度
PTB	0.0326%	0.0127%	0.5144%	0.0750%
NPL	0.0087%	0.0107%	0.1465%	0.0168%
MIKES	0.0148%	0.0382%	−0.0387%	0.0391%
BIPM	0.0171%	0.0108%	0.0073%	0.0147%
NIST	0.0254%	0.0105%	0.0086%	0.0139%

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表 2 相对不确定度分析

Table 2. Uncertainty analysis

不确定度分量	不确定度贡献（×10⁻⁵）
x-y位移台定位准确度	1.2
待测光阑倾斜	1.4
扫描步长大小	1.5
光阑边缘的影响	5.0
积分球均匀性	2.0
温度效应	0.9
杂散光	1.0
重复性	6.6
合成标准不确定度	8.9
扩展不确定度（k=2）	18

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参考文献(16)

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