紫外LED计量标准装置的建立

王彦飞; 代彩红; 许超群; 李玲; 吴志峰; 程秋桐; 贺书芳; 刘金元; 谢一航

doi:10.12338/j.issn.2096-9015.2021.0610

紫外LED计量标准装置的建立

doi: 10.12338/j.issn.2096-9015.2021.0610

中国计量科学研究院，北京 100029

基金项目: 质量技术监督能力提升专项（ANL1909）；国家重点研发计划重点专项（2018YFF0212402）。

详细信息

作者简介:
王彦飞（1985-），中国计量科学研究院副研究员，研究方向：紫外辐射度、光谱辐射度、LED辐射度等，邮箱：wangyf@nim.ac.cn

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出版历程
- 网络出版日期: 2022-04-12

Establishment of UV LED Measurement Standard

National Institute of Metrology, Beijing 100029, China

摘要

摘要: 针对紫外LED辐射度的计量需求，建立了紫外LED辐射度计量标准装置。利用该装置可对紫外LED、紫外标准灯等紫外辐射源的各辐射参数（包括光谱辐射照度、曝辐射量、光谱辐射通量、平均辐射强度等）进行测量，并进一步推导出峰值波长、中心波长、带宽、相对光谱分布、光子通量、光子通量密度、外量子效率、紫外危害等参数的值。紫外LED计量标准装置采用基准级光谱辐射计，以及自主设计研制的测量系统与控制系统。200～450 nm光谱辐射照度的合成标准不确定度为3.3%～0.6%；200～450 nm光谱辐射通量的合成标准不确定度为3.4%～0.8%。此计量标准装置的建立，填补了紫外光谱辐射通量这一计量参数的空白，大幅提升了紫外辐射照度的测量不确定度水平，为紫外固化、紫外消毒杀菌等应用领域提供可靠的计量溯源。
- 紫外LED /
- LED辐射度 /
- 紫外辐射照度 /
- 紫外辐射强度 /
- 紫外辐射通量 /
- 紫外固化 /
- 紫外消毒杀菌
Abstract: The UV LED measurement standard was established to satisfy the high demand for UV LED calibration. The measurement apparatus can measure the optical radiometry parameters (including spectral or broadband irradiance, radiant exposure, spectral or broadband radiant flux, average radiant intensity) of UV LED and UV standard lamps, and further derive the values of peak wavelength, center wavelength, bandwidth, relative spectral distribution, photon flux, photon flux density, external quantum efficiency, and ultraviolet hazards. The UV LED measurement standard adopts a spectroradiometer at primary standard level, as well as the self-designed measurement system and control system. The combined standard uncertainty for 200～450 nm spectral irradiance is 3.3%～0.6%, while the combined standard uncertainty for 200～450 nm spectral radiant flux is 3.4%～0.8%. The establishment of UV LED measurement standard fills the gap in UV spectral radiant flux, significantly improves the measurement uncertainty of UV irradiance, and provides accurate traceability for UV curing and UV disinfection.
- UV LED /
- LED radiometry /
- UV irradiance /
- UV radiant intensity /
- UV radiant flux /
- UV curing /
- UV disinfection

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图 1 紫外LED光谱辐射照度测量示意图

Figure 1. Schematic diagram of UV LED spectral irradiance measurement

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图 2 相对积分球法测量示意图

Figure 2. Schematic diagram of UV LED spectral radiant flux measurement using relative integrating sphere method

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图 3 变角辐射计法测量示意图

Figure 3. Schematic diagram of UV LED spectral radiant flux measurement using gonioradiometer method

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图 4 紫外LED相对光谱分布

Figure 4. Relative spectral distribution of UV LED

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图 5 紫外LED相对辐射强度分布

Figure 5. Relative radiant intensity curve of UV LED

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表 1 光谱辐射照度测量不确定度

Table 1. Measurement uncertainty of spectral irradiance

波长/nm	u/%	波长/nm	u/%
200	3.3	330	0.8
210	2.7	340	0.7
220	2.3	350	0.7
230	2.0	360	0.7
240	1.6	370	0.7
250	1.2	380	0.7
260	1.0	390	0.7
270	1.0	400	0.6
280	1.0	410	0.6
290	0.9	420	0.6
300	0.8	430	0.6
310	0.8	440	0.6
320	0.8	450	0.6

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表 2 光谱辐射通量测量不确定度

Table 2. Measurement uncertainty of spectral radiant flux

波长/nm	u/%	波长/nm	u/%
200	3.4	330	0.9
210	2.8	340	0.8
220	2.4	350	0.8
230	2.0	360	0.8
240	1.7	370	0.8
250	1.3	380	0.8
260	1.1	390	0.8
270	1.1	400	0.8
280	1.1	410	0.8
290	1.0	420	0.8
300	1.0	430	0.8
310	1.0	440	0.8
320	0.9	450	0.8

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表 3 典型紫外LED测量结果

Table 3. Measurement results of typical UV LED

编号	S1	S2	S3	S4	S5	S6
电压(V)	12.27	6.43	4.97	3.70	3.41	3.43
电流(mA)	100	100	60	350	350	350
峰值波长(nm)	266.7	278.7	306.2	369.6	384.1	401.9
带宽(nm)	11.7	12.9	14.2	8.9	10.7	14.8
辐射照度(W·m⁻²)	3.02E-1	1.14	1.37E-1	63.2	68.0	65.9
平均辐射强度(W·sr⁻¹)	3.02E-3	1.14E-2	1.37E-3	6.32E-1	6.80E-1	6.59E-1
光子通量密度(s⁻¹·m⁻²)	4.07E17	1.61E18	2.14E17	1.18E20	1.31E20	1.33E20
辐射通量(mW)	11.44	9.90	6.38	539.8	586.9	568.8
光子通量 (s⁻¹)	1.54E16	1.39E16	9.96E15	1.01E18	1.14E18	1.15E18
外量子效率	2.5%	2.2%	2.7%	46.1%	52.0%	52.8%

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