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Research on Micro Vibration Measurement and Analysis Method of Using Environment for Precision Instrument
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摘要: 精密仪器作为实验室必备的重要装备，振幅较微弱的环境振动已逐渐成为影响精密仪器测量精度的重要因素。为建立精密仪器使用环境微振动测试与分析统一技术标准，本文明确了测试系统构成及测试设备主要技术指标，详细表述了场地振动测试、建筑物振动测试和防微振基台振动测试基本原理，并给出振动数据采集要求和分析方法。此研究成果将为精密仪器使用环境选址测试及防微振工程过程质量控制和验收提供重要依据。Abstract: As an essential equipment in the laboratory, the environmental vibration with micro amplitude has gradually become an important factor affecting the measurement accuracy of precision instruments. In order to establish a unified technical standard for micro vibration test and analysis of precision instrument use environment, this article defines the composition of the test system and the main technical indicators of the test equipment, describes in detail the basic principles of site micro vibration test, building micro vibration test and anti micro vibration base platform micro vibration test, and gives the requirements for vibration data collection and analysis methods. This research result will provide an important basis for the site selection test of the using environment of precision instruments and the quality control and acceptance of the anti micro vibration engineering process.
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Key words:
- precision instruments /
- laboratory /
- micro vibration /
- testing
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图 5 地面和孔中测试位置示意图
Figure 5. Schematic diagram of test location on the ground and in the hole
表 1 传感器选用技术要求
Table 1. Technical requirements for sensor selection
被测振动速度量
级/（µm·s−1）传感器频率
范围/Hz速度型传感器
分辨力/（m·s−1）加速度型传感
器分辨力/g6.25 1～100 10−6 10−7 3.12 1～100 10−6 10−7 1.56 1～100 10−7 10−7 0.78 1～100 10−7 10−7 注：被测振动速度量级指频域振动1/3倍频程均方根值。 
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