集成电路高精度晶圆测温技术研究

王光耀; 孙建平; 李婷; 汪洪军; 李嘉豪; 陈泽川; 高传吉

doi:10.12338/j.issn.2096-9015.2022.0263

集成电路高精度晶圆测温技术研究

doi: 10.12338/j.issn.2096-9015.2022.0263

1.
中国计量科学研究院，北京 100029
2.
中国计量大学，杭州 310018

基金项目: 中国计量科学研究院基本科研业务费重点领域项目（26-AKYZD2004-3）。

详细信息

作者简介:
王光耀（1990-），中国计量科学研究院助理研究员，研究方向：温度计量，邮箱：wanggy@nim.ac.cn

通讯作者:
孙建平（1978-），中国计量科学研究院研究员，研究方向：温度计量，邮箱：sunjp@nim.ac.cn

计量
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出版历程
- 收稿日期: 2022-11-04
- 录用日期: 2022-12-01
- 网络出版日期: 2023-03-13

Research on High Precision Wafer Temperature Measurement Technology for Integrated Circuit

1.
National Institute of Metrology, Beijing 100029, China
2.
China Jiliang University, Hangzhou 310018, China

摘要

摘要: 集成电路从硅片制造、电路设计、晶圆加工、封装直到出厂存在近千道工艺，温度始终贯穿其中，温度的精密测量已成为不可或缺的关键技术。针对我国“缺芯少魂”的芯片产业发展困境及集成电路领域对于精密测温的迫切需求，展开传感器选型、长期稳定性考察及标定方法研究，发展多通道高精度测温电路技术，形成测温晶圆标定方法，研制了一套33路有线高精度晶圆温度测量系统。测试结果表明，NTC热敏电阻温度计能够满足高精度晶圆测温需求；拟合温度点的选取对于标定结果具有较大影响，通过不同标定温度点数量及分布的拟合结果比较，最终选取六点拟合，实现了21℃～23℃范围内偏差小于3 mK，测量不确定度7.4 mK（k=2）的结果。
- 集成电路 /
- 晶圆 /
- NTC热敏电阻 /
- 温度测量 /
- 不确定度
Abstract: Integrated circuit technology includes nearly a thousand processes from wafer manufacturing, circuit design, wafer processing, packaging to delivery. Precision measurement of temperature has become an indispensable technology in these processes. This paper focuses on the development dilemma of China's chip industry and the urgent need for precise temperature measurement in the field of integrated circuits. Sensor selection, long-term stability investigation and calibration method are studied. The multi-channel high-precision acquisition and control circuit technology has been developed. A calibration method of temperature measurement wafer is formed. A 33-channel wired high precision wafer temperature measurement system is developed. The results show that the NTC thermistor thermometer can meet the demand of high precision wafer temperature measurement. The selection of fitting temperature points has a great influence on the calibration results. By comparing the fitting results of the number and distribution of different calibration temperature points, six temperature points were finally selected for fitting, and the deviation in the range of 21℃~23℃ was less than 3 mK, and the measurement uncertainty was 7.4 mK (k=2).
- integrated circuit /
- wafer /
- NTC thermistor /
- temperature measurement /
- uncertainty

HTML全文

图 1 NTC热敏电阻半年稳定性结果

Figure 1. Test result of half-year stability of NTC thermistor elements

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图 2 NTC热敏电阻校准系统

Figure 2. NTC thermistor calibration system

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图 3 电路稳定性测试系统

Figure 3. Circuit stability test system

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图 4 温度传感器分布图

Figure 4. Temperature sensor distribution diagram

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图 5 测温晶圆标定示意图

Figure 5. Schematic diagram of temperature measurement wafer calibration

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图 6 系统开启后温度随时间变化

Figure 6. Temperature changes with time after the system is turned on

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图 7 在10 ℃、21 ℃、23 ℃、30 ℃温度点校准结果验证

Figure 7. Calibration results were verified at temperature points of 10 ℃, 21 ℃, 23 ℃ and 30 ℃

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表 1 晶圆测温系统测温不确定度

Table 1. Temperature measurement uncertainty of wafer temperature measurement system

不确定度来源	标准不确定度 / mK （21℃~23℃）
多通道精密测温仪	1.4
NTC热敏电阻温度计稳定性	2.3
恒温槽稳定性、均匀性	1.7
多次测量重复性	1.7
SPRT校准	0.3
合成标准不确定度	3.6
扩展不确定度（k=2）	7.2

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