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集成电路高精度晶圆测温技术研究

王光耀 孙建平 李婷 汪洪军 李嘉豪 陈泽川 高传吉

王光耀,孙建平,李婷,等. 集成电路高精度晶圆测温技术研究[J]. 计量科学与技术,2023, 67(4): 77-82, 27 doi: 10.12338/j.issn.2096-9015.2022.0263
引用本文: 王光耀,孙建平,李婷,等. 集成电路高精度晶圆测温技术研究[J]. 计量科学与技术,2023, 67(4): 77-82, 27 doi: 10.12338/j.issn.2096-9015.2022.0263
WANG Guangyao, SUN Jianping, LI Ting, WANG Hongjun, LI Jiahao, CHEN Zechuan, GAO Chuanji. Research on High-Precision Temperature Measurement Techniques for Integrated Circuits[J]. Metrology Science and Technology, 2023, 67(4): 77-82, 27. doi: 10.12338/j.issn.2096-9015.2022.0263
Citation: WANG Guangyao, SUN Jianping, LI Ting, WANG Hongjun, LI Jiahao, CHEN Zechuan, GAO Chuanji. Research on High-Precision Temperature Measurement Techniques for Integrated Circuits[J]. Metrology Science and Technology, 2023, 67(4): 77-82, 27. doi: 10.12338/j.issn.2096-9015.2022.0263

集成电路高精度晶圆测温技术研究

doi: 10.12338/j.issn.2096-9015.2022.0263
基金项目: 中国计量科学研究院基本科研业务费重点领域项目(26-AKYZD2004-3)。
详细信息
    作者简介:

    王光耀(1990-),中国计量科学研究院助理研究员,研究方向:温度计量,邮箱:wanggy@nim.ac.cn

    通讯作者:

    孙建平(1978-),中国计量科学研究院研究员,研究方向:温度计量,邮箱:sunjp@nim.ac.cn

  • 中图分类号: TB942

Research on High-Precision Temperature Measurement Techniques for Integrated Circuits

  • 摘要: 集成电路从硅片制造、电路设计、晶圆加工、封装直到出厂存在近千道工艺,温度始终贯穿其中,温度的精密测量已成为不可或缺的关键技术。针对我国“缺芯少魂”的芯片产业发展困境及集成电路领域对于精密测温的迫切需求,展开传感器选型、长期稳定性考察及标定方法研究,发展多通道高精度测温电路技术,形成测温晶圆标定方法,研制了一套33路有线高精度晶圆温度测量系统。测试结果表明,NTC热敏电阻温度计能够满足高精度晶圆测温需求;拟合温度点的选取对于标定结果具有较大影响,通过不同标定温度点数量及分布的拟合结果比较,最终选取六点拟合,实现了21℃~23℃范围内偏差小于3 mK,测量不确定度7.4 mK(k=2)的结果。
  • 图  1  NTC热敏电阻半年稳定性结果

    Figure  1.  Half-year stability results of NTC thermistor

    图  2  NTC热敏电阻校准系统

    Figure  2.  Calibration system of NTC thermistor

    图  3  电路稳定性测试系统

    Figure  3.  Circuit stability test system

    图  4  温度传感器分布图

    Figure  4.  Distribution diagram of temperature sensors

    图  5  测温晶圆标定示意图

    Figure  5.  Schematic diagram of temperature

    图  6  系统开启后温度随时间变化

    Figure  6.  Temperature variation over time after system activation

    图  7  在10 ℃、21 ℃、23 ℃、30 ℃温度点校准结果验证

    Figure  7.  Verification of calibration results at temperature points of 10 ℃, 21 ℃, 23 ℃, and 30 ℃

    表  1  晶圆测温系统测温不确定度

    Table  1.   Uncertainty of temperature measurement in wafer temperature measurement system

    不确定度来源标准不确定度 / mK(21℃~23℃)
    多通道精密测温仪1.4
    NTC热敏电阻温度计稳定性2.3
    恒温槽稳定性、均匀性1.7
    多次测量重复性1.7
    SPRT校准0.3
    合成标准不确定度3.6
    扩展不确定度(k=2)7.2
    下载: 导出CSV
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出版历程
  • 收稿日期:  2022-11-04
  • 录用日期:  2022-12-01
  • 修回日期:  2023-03-10
  • 网络出版日期:  2023-03-13
  • 刊出日期:  2023-04-18

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