Abstract:
The quartz flexible accelerometer is a fundamental measuring element in inertial navigation systems, used to measure the system's linear acceleration. Due to its advantages of high precision, high sensitivity, and high stability, quartz flexible accelerometers are widely used in the aerospace field. The quartz pendulous reed is the core component of the quartz flexible accelerometer. It senses physical information such as the speed and acceleration of the measured object. The processing accuracy of the quartz pendulous reed affects the performance of the quartz flexible accelerometer. Therefore, it is particularly important to measure the geometric parameters of the quartz pendulous reed. In this paper, an automated measuring instrument for the geometric parameters of the quartz pendulous reed is introduced. Using this system, methods for measuring the thickness, step height, and droop of the quartz pendulous reed based on a chromatic confocal sensor are proposed. The uncertainties of different measurement methods are analyzed. Experimental measurements of the geometric parameters of quartz pendulous reeds demonstrate that the device has the advantages of simple operation and high accuracy. The device achieves automatic detection of the geometric parameters of quartz pendulous reeds, greatly improving detection efficiency and having significant implications for their automated inspection.