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Research Progress in Optical Quantum Pressure Standards
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摘要: 光学法量子压力标准具有原级测量、极高分辨率、固有准确、不依赖某一实物标准的巨大优势，是新一代压力计量基准的发展方向。国内外多家计量研究机构及大学均开展了相关研究。介绍了基于法布里-珀罗腔的光学法量子压力测量的工作原理，综述了国内外在光学法量子压力领域的研究现状，回顾了中国计量科学研究院针对光学法量子压力标准装置性能提升研究开展的相关工作，包括真空出气效应抑制、零点误差消除、修正项独立测定等方面的研究进展，讨论了光学法量子压力标准未来的研究重点和发展趋势。Abstract: Optical quantum pressure standards offer significant advantages in primary measurement, including extremely high resolution, inherent accuracy, and independence from physical artifacts. These characteristics make them the preferred direction for developing next-generation pressure measurement benchmarks. Numerous metrology research institutions and universities worldwide have conducted relevant studies in this field. This paper introduces the working principle of optical quantum pressure measurement based on Fabry-Pérot cavities. It provides a comprehensive review of the current research status in optical quantum pressure standards both domestically and internationally. The article also recounts the work conducted by the National Institute of Metrology of China to enhance the performance of optical quantum pressure standard devices. This includes research progress in suppressing vacuum outgassing effects, eliminating zero-point errors, and independently determining correction factors. Furthermore, the paper discusses future research priorities and development trends for optical quantum pressure standards.
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图 1 NIST ULE玻璃双FP腔[12]
Figure 1. NIST dual FP cavity made of a single block of ultra-low expansion (ULE) glass
图 2 基于气体调制法（GAMOR）的光学法量子压力测量原理图
注：（a）单次循环过程；（b）虚线：以任意拍频为起点，对应测量的系统拍频；红线：两次测量之间抽空腔的拍频；实线：修正由于加压充气导致的测量漂移后的拍频 [13]。
Figure 2. Schematic of optical quantum pressure measurement based on gas modulation (GAMOR) method
图 7 NIM-OPS与基准活塞压力计的比对测量结果[17]
Figure 7. Comparison results of NIM-OPS with the piston gauge standard
图 8 双腔比对压力测量结果
注：彩点是双腔测量得到的气体压力之差，黑点是一次测得的气体压力与薄膜压力计读数之差，红线为双腔结果之差的平均值∆P=3.0±3 Pa[19]。
Figure 8. Comparison of the pressure measurement results of the dual cavities
图 11 NIM-OPS 测量腔绝对谐振频率在30°C～38 °C随温度的变化及拟合得到的热膨胀系数与零膨胀温度点[23]
注：彩点是不同温度点下测量腔绝对谐振频率，黑点是拟合得到的零膨胀温度点，蓝线是根据拟合推导得到测量腔热膨胀系数。
Figure 11. Changes in absolute frequency of the MC measured in the temperature range 30°C to 38 °C and the fitting curve of CTE and its zero-point
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