基于SPM与DIC技术的应变场测量改进方法

柏文琦; 向德; 王柠莎

doi:10.3969/j.issn.2096-9015.2021.03.16

基于SPM与DIC技术的应变场测量改进方法

doi: 10.3969/j.issn.2096-9015.2021.03.16

湖南省计量检测研究院，长沙 410014

基金项目: 湖南省科技创新计划资助（2018XK2008）

详细信息

作者简介:
柏文琦（1980-），湖南省计量检测研究院高级工程师，研究方向：计量测试技术、故障监测分析，邮箱：baiwenqi2@qq.com

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出版历程
- 网络出版日期: 2021-04-13

Improved Strain Field Measurement Based on SPM and DIC

Hunan Institute of Metrology and Test, Changsha 410014, China

摘要

摘要: 微纳米尺度下的应力/应变测量方法是实验力学研究的重要方向之一。现有的许多研究忽略了待测试件表面的散斑图质量、系统随机误差、计算流程等因素对最终的应变场测量精度的影响。围绕基于扫描探针显微镜的数据图像相关技术实现过程，提出科学的评估准则、优化位移场计算方法。实验结果表明，所提出的应变场计算方法在精度控制方面的性能得到显著提升。
- 计量学 /
- 应变场测量 /
- 扫描探针显微镜 /
- 数字图像相关法 /
- 平均灰度梯度 /
- 微纳米计量
Abstract: The strain field measurement on the micro/nano scale is one of the most important research topics of experimental mechanics. Most existing research ignored the influences of the speckle image quality, the systematic random error, calculation processes and other factors on the accuracy of strain field measurement. In order to overcome the above challenges, the implementation of the Digital Image Correlation (DIC) technique based on the Scanning Probe Microscope (SPM) was investigated, and scientific evaluation criteria and an improved displacement field calculation method were proposed. Experimental results showed that the estimation performance of the displacement field was significantly enhanced in terms of accuracy control.
- metrology /
- strain field measurement /
- SPM /
- DIC /
- average grayscale gradient /
- micro/nano metrology

HTML全文

图 1 基于SPM与DIC技术的应变场测量流程图

Figure 1. Flowchart of strain field measurement based on SPM and DIC

下载: 全尺寸图片幻灯片

图 2 根据式(10)得到的散斑图

Figure 2. Speckle image obtained by Eq. (10)

下载: 全尺寸图片幻灯片

图 3 根据式(11)得到的散斑图

Figure 3. Speckle image obtained by Eq. (11)

下载: 全尺寸图片幻灯片

图 4 R=5时根据式(10)得到的散斑灰度三维分布图

Figure 4. Distribution of grayscale values of the speckle image obtained by Eq. (10) when R=5

下载: 全尺寸图片幻灯片

图 5 R=5时根据式(11)得到的散斑灰度三维分布图

Figure 5. Distribution of grayscale values of the speckle image obtained by Eq. (11) when R=5

下载: 全尺寸图片幻灯片

表 1 散斑图平均灰度梯度对比

Table 1. Average grayscale gradient of speckle images

选取函数 R=1 R=3 R=5

式(10) 1.86 1.86 1.88
式(11) 0.06 0.38 0.75

下载: 导出CSV

表 2 位移场估计误差

Table 2. Estimation error of the displacement field

变形程度 3 6 9 12

散斑区域尺寸 48 5.9% 6.5% 7.2% 3.8%
64 4.7% 6.2% 5.4% 3.4%
128 1.1% 1.3% 1.2% 1.3%

下载: 导出CSV

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