The Calibration Method of Transmission Electron Microscope
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摘要: 研究了透射电镜放大倍率校准用标准物质及其溯源路径,进行了透射电镜放大倍率及污染率/漂移率校准方法和校准结果不确定度评定,可为透射电镜在科学研究和生产应用中测量结果提供准确可靠的校准方法。Abstract: In this paper, reference materials for transmission electron microscope (TEM) magnification calibration and their traceability were studied, and the TEM magnification and contamination/drift rate calibration methods and uncertainty evaluation of calibration results were carried out. This study can provide an accurate and reliable calibration method for measuring the results of TEM in scientific research and industrial applications.
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Key words:
- transmission electron microscope /
- magnification /
- reference material /
- calibration /
- uncertainty
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表 1 透射电镜的计量特性和性能指标
Table 1. Metrological characteristics and performance indicators of TEM
计量特性 放大倍率(M) 性能指标 放大倍率示值误差 M>300000 不超过±3% 300000≥M>100000 不超过±5% M≤100000 不超过±8% 样品污染率 M≤100000 不大于2 nm/min 样品漂移率 M≤100000 不大于2 nm/min 表 2 我国研制的透射电镜放大倍率校准用标准物质
Table 2. Reference materials for magnification calibration of transmission electron microscope developed in China
标准物质 量值特征 测量范围 研制机构 金薄膜晶面间距GBW13655 晶面间距0.2366 nm
不确定度0.0030 nm高放大倍率 中国计量科学研究院 二氧化硅薄膜厚度GBW13965 膜厚9.92 nm
不确定度0.40 nm中放大倍率 中国计量科学研究院 超晶格多层膜厚度GBW13955(6~10层) 膜厚10.60 nm
不确定度0.18 nm中、低放大倍率 中国计量科学研究院 氮化硅薄膜厚度GBW13961 膜厚52.67 nm
不确定度0.28 nm低放大倍率 中国计量科学研究院 -
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