Citation: | XU Tao, ZHAO Yaru. Calibration Device for CO2 Laser Power Based on Chopper Sampling and Attenuation Technique[J]. Metrology Science and Technology, 2021, 65(8): 15-18, 54. doi: 10.12338/j.issn.2096-9015.2020.9059 |
[1] |
Kotyuk A F, Liberman A A, Ulanovskii M Y. Assurance of the uniformity of measurements of the power of laser radiation[J]. Measurement Techniques, 2005, 48(11): 1070-1074. doi: 10.1007/s11018-006-0022-y
|
[2] |
Dowell M L, Cromer C L, Jones R D, et al. New developments in deep ultraviolet laser metrology for photolithography[C]. Seiler D. Characterization and Metrology for ULSI Technology. Americal: American Institute of Physics, 2001: 361-363.
|
[3] |
Rysin V V, AB Kubarev, Kubyshkin V V. Precision calibrating equipment for laser power[J]. Measurement Techniques, 1983, 26(10): 819-822.
|
[4] |
Kueck S, Liegmann K, Moestl K, et al. Laser radiometry for UV lasers at 193 nm[C]. Exarhos G. Laser-induced Damage in Optical Matls. Washington: SPIE, 2003: 645-655.
|
[5] |
Li X Y, Scott T, Shao Y, et al. Nonlinearity measurements of high-power laser detectors at NIST[J]. Journal of Research of the National Institute of Standards & Technology, 2004, 109(4): 429-434.
|
[6] |
Brandt F, S Kück, A Grütz. Traceable laser power measurements of diode laser radiation in the near infrared[J]. MAPAN-Journal of Metrology Society of India, 2010, 25(1): 29-35.
|
[7] |
李英娜, 于靖. 激光中功率基准装置的改造[J]. 现代测量与实验室管理, 2000, 8(2): 15-19.
|
[8] |
徐涛, 于靖, 邓玉强, 等. 准分子激光功率标准探测器的研制[J]. 应用光学, 2006, 33(4): 999-1002.
|
[9] |
Grosjean D F, Olson R A, Sarka B, et al. High‐power CO2 laser‐beam monitor[J]. Review of Scientific Instruments, 1978, 49(6): 778-781. doi: 10.1063/1.1135613
|
[10] |
高雪松, 高春清, 高明伟, 等. 高精度激光参数测量系统中衰减系统的研究与评价[J]. 强激光与粒子束, 2006, 18(2): 15-18.
|
[11] |
Li X Y, Scott T, Cromer C, et al. Reflective optical chopper used in NIST high-power laser measurements[J]. Journal of Research of the National Institute of Standards & Technology, 2008, 113(6): 305-309.
|
[12] |
Lander M L, Bagford J O, Seibert D B, et al. High power calibration of commercial power meters using an NIST‐traceable secondary standard[J]. Journal of Laser Applications, 1996, 8(2): 103-107. doi: 10.2351/1.4745410
|
[13] |
钱铮. 参考输出占空比可调的双光路斩光器[J]. 苏州大学学报(工科版), 1998, 18(3): 48-52.
|
[14] |
林鑫, 杨勇, 程学武, 等. 机械斩波在大气探测激光雷达中的应用[J]. 中国激光, 2013, 40(8): 217-222.
|
[15] |
杨俊梅, 曹泽新, 栾玉国, 等. LD泵浦机械斩波调Q激光器的设计[J]. 沈阳师范大学学报(自然科学版), 2016, 34(4): 449-453.
|