Volume 65 Issue 8
Aug.  2021
Turn off MathJax
Article Contents
XU Tao, ZHAO Yaru. Calibration Device for CO2 Laser Power Based on Chopper Sampling and Attenuation Technique[J]. Metrology Science and Technology, 2021, 65(8): 15-18, 54. doi: 10.12338/j.issn.2096-9015.2020.9059
Citation: XU Tao, ZHAO Yaru. Calibration Device for CO2 Laser Power Based on Chopper Sampling and Attenuation Technique[J]. Metrology Science and Technology, 2021, 65(8): 15-18, 54. doi: 10.12338/j.issn.2096-9015.2020.9059

Calibration Device for CO2 Laser Power Based on Chopper Sampling and Attenuation Technique

doi: 10.12338/j.issn.2096-9015.2020.9059
  • Available Online: 2021-07-14
  • Publish Date: 2021-08-01
  • The calibration repeatability of CO2 laser and the power range that can be calibrated are reduced by the laser's poor power stability and adjustability. The repeatability can be improved by monitoring the CO2 laser power in real time with a beam splitting system. But for 10.6 μm laser, the reflectance of ZnSe beam splitters is very unstable, which leads to fluctuation of the monitor ratio. Based on the principle of chopper, a chopper sampling and attenuation system was developed. The attenuation range is 0.2%~50%. Through an optimization design of the control unit, the interference between two sets of choppers in the same beam was avoided. The monitor ratio of the calibration setup was tested, and the monitor ratio instability was less than 1.1%, which is significantly better than that of ZnSe beam splitters (8.6%). The repeatability (k = 1) of the correction factor of the measured laser power meter improved from 1.09% (without a monitor) to 0.62%. The chopper sampling and attenuation system proposed in this paper improves the repeatability of calibration results and increases the power adjustment capability in CO2 laser power calibrations.
  • loading
  • [1]
    Kotyuk A F, Liberman A A, Ulanovskii M Y. Assurance of the uniformity of measurements of the power of laser radiation[J]. Measurement Techniques, 2005, 48(11): 1070-1074. doi: 10.1007/s11018-006-0022-y
    [2]
    Dowell M L, Cromer C L, Jones R D, et al. New developments in deep ultraviolet laser metrology for photolithography[C]. Seiler D. Characterization and Metrology for ULSI Technology. Americal: American Institute of Physics, 2001: 361-363.
    [3]
    Rysin V V, AB Kubarev, Kubyshkin V V. Precision calibrating equipment for laser power[J]. Measurement Techniques, 1983, 26(10): 819-822.
    [4]
    Kueck S, Liegmann K, Moestl K, et al. Laser radiometry for UV lasers at 193 nm[C]. Exarhos G. Laser-induced Damage in Optical Matls. Washington: SPIE, 2003: 645-655.
    [5]
    Li X Y, Scott T, Shao Y, et al. Nonlinearity measurements of high-power laser detectors at NIST[J]. Journal of Research of the National Institute of Standards & Technology, 2004, 109(4): 429-434.
    [6]
    Brandt F, S Kück, A Grütz. Traceable laser power measurements of diode laser radiation in the near infrared[J]. MAPAN-Journal of Metrology Society of India, 2010, 25(1): 29-35.
    [7]
    李英娜, 于靖. 激光中功率基准装置的改造[J]. 现代测量与实验室管理, 2000, 8(2): 15-19.
    [8]
    徐涛, 于靖, 邓玉强, 等. 准分子激光功率标准探测器的研制[J]. 应用光学, 2006, 33(4): 999-1002.
    [9]
    Grosjean D F, Olson R A, Sarka B, et al. High‐power CO2 laser‐beam monitor[J]. Review of Scientific Instruments, 1978, 49(6): 778-781. doi: 10.1063/1.1135613
    [10]
    高雪松, 高春清, 高明伟, 等. 高精度激光参数测量系统中衰减系统的研究与评价[J]. 强激光与粒子束, 2006, 18(2): 15-18.
    [11]
    Li X Y, Scott T, Cromer C, et al. Reflective optical chopper used in NIST high-power laser measurements[J]. Journal of Research of the National Institute of Standards & Technology, 2008, 113(6): 305-309.
    [12]
    Lander M L, Bagford J O, Seibert D B, et al. High power calibration of commercial power meters using an NIST‐traceable secondary standard[J]. Journal of Laser Applications, 1996, 8(2): 103-107. doi: 10.2351/1.4745410
    [13]
    钱铮. 参考输出占空比可调的双光路斩光器[J]. 苏州大学学报(工科版), 1998, 18(3): 48-52.
    [14]
    林鑫, 杨勇, 程学武, 等. 机械斩波在大气探测激光雷达中的应用[J]. 中国激光, 2013, 40(8): 217-222.
    [15]
    杨俊梅, 曹泽新, 栾玉国, 等. LD泵浦机械斩波调Q激光器的设计[J]. 沈阳师范大学学报(自然科学版), 2016, 34(4): 449-453.
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索

    Figures(4)  / Tables(1)

    Article Metrics

    Article views (87) PDF downloads(14) Cited by()
    Proportional views
    Related

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return