Volume 66 Issue 3
Mar.  2022
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ZHAO Hong, YAN Haoming, LIU Ying. Comparison Study on Straightness Detection of Two Mirror Sets by Laser Interferometer[J]. Metrology Science and Technology, 2022, 66(3): 54-57, 29. doi: 10.12338/j.issn.2096-9015.2021.0645
Citation: ZHAO Hong, YAN Haoming, LIU Ying. Comparison Study on Straightness Detection of Two Mirror Sets by Laser Interferometer[J]. Metrology Science and Technology, 2022, 66(3): 54-57, 29. doi: 10.12338/j.issn.2096-9015.2021.0645

Comparison Study on Straightness Detection of Two Mirror Sets by Laser Interferometer

doi: 10.12338/j.issn.2096-9015.2021.0645
  • Accepted Date: 2022-02-20
  • Available Online: 2022-02-23
  • Publish Date: 2022-03-08
  • This paper introduces the measurement principle, detection methods, and precautions of using the laser interferometer straightness mirror set and angular mirror set to detect straightness, and focuses on the comparative analysis of the two detection methods. Relying on the detection data, this paper analyzed the differences in the accuracy, advantages, and application environments of the two detection methods.
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