Volume 67 Issue 4
Apr.  2023
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WANG Guangyao, SUN Jianping, LI Ting, WANG Hongjun, LI Jiahao, CHEN Zechuan, GAO Chuanji. Research on High-Precision Temperature Measurement Techniques for Integrated Circuits[J]. Metrology Science and Technology, 2023, 67(4): 77-82, 27. doi: 10.12338/j.issn.2096-9015.2022.0263
Citation: WANG Guangyao, SUN Jianping, LI Ting, WANG Hongjun, LI Jiahao, CHEN Zechuan, GAO Chuanji. Research on High-Precision Temperature Measurement Techniques for Integrated Circuits[J]. Metrology Science and Technology, 2023, 67(4): 77-82, 27. doi: 10.12338/j.issn.2096-9015.2022.0263

Research on High-Precision Temperature Measurement Techniques for Integrated Circuits

doi: 10.12338/j.issn.2096-9015.2022.0263
  • Received Date: 2022-11-04
  • Accepted Date: 2022-12-01
  • Rev Recd Date: 2023-03-10
  • Available Online: 2023-03-13
  • Publish Date: 2023-04-18
  • The process of integrated circuit fabrication spans from silicon wafer manufacturing, circuit designing, wafer processing, packaging to the final product, involving nearly a thousand steps where precision temperature control plays a pivotal role. Given the pressing demand for precise temperature measurements in integrated circuit production and the current challenges faced by China's chip industry, this study investigated sensor selection, long-term stability, and calibration methods. Consequently, a multi-channel high-precision temperature measurement circuit technology was developed and a calibration method for temperature measurement wafers was established. Further, a 33-channel wired high-precision wafer temperature measurement system was constructed. Experimental results demonstrate that the NTC thermistor thermometer can satisfy the requirements of high-precision wafer temperature measurements. Calibration results greatly depend on the selection of fitting temperature points. Through comparison of different calibration temperature point distributions and quantities, a six-point fitting was chosen, achieving a deviation less than 3 mK within a 21℃~23℃ range, and measurement uncertainty of 7.4 mK (k=2).
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