Volume 67 Issue 6
Jun.  2023
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CHANG Zhikun, ZHANG Wanyi, SHEN Xiaoyu, MU Qun, HAN Xiaoling, SONG Song, NIU Pengfei, DENG Xiao, CHENG Xinbin. Design and Simulation of a Self-Traceable MOEMS Accelerometer Oscillator[J]. Metrology Science and Technology, 2023, 67(6): 9-15, 43. doi: 10.12338/j.issn.2096-9015.2023.0109
Citation: CHANG Zhikun, ZHANG Wanyi, SHEN Xiaoyu, MU Qun, HAN Xiaoling, SONG Song, NIU Pengfei, DENG Xiao, CHENG Xinbin. Design and Simulation of a Self-Traceable MOEMS Accelerometer Oscillator[J]. Metrology Science and Technology, 2023, 67(6): 9-15, 43. doi: 10.12338/j.issn.2096-9015.2023.0109

Design and Simulation of a Self-Traceable MOEMS Accelerometer Oscillator

doi: 10.12338/j.issn.2096-9015.2023.0109
  • Received Date: 2023-04-14
  • Accepted Date: 2023-05-08
  • Rev Recd Date: 2023-05-11
  • Available Online: 2023-07-27
  • Publish Date: 2023-06-18
  • MOEMS accelerometers are emerging as a pivotal trend in acceleration sensor technology. The accuracy of their measurements predominantly hinges on optical displacement detection methods. The coherent design and the congruence of the oscillator are pivotal for maximizing measurement efficacy. This study introduces a super-precise displacement measurement method, the self-traceable grating interferometry, marked by its direct traceability, high precision, and miniaturization, aligning seamlessly with the displacement measurement prerequisites of MOEMS accelerometers. Leveraging the properties of the self-traceable grating interferometry, we design, calculate, and simulate the oscillator of a self-traceable MOEMS accelerometer. Through the mechanical theory model, we deduced the stiffness and natural frequency of the oscillator. Utilizing the COMSOL software, simulations were run on its resonant modes, axial sensitivities, and stress distributions. Our design achievements include a oscillator with a remarkable displacement sensitivity reaching 10.01 μm/g and exhibiting minimal cross-coupling. Such advancements underscore the value of this research in the realm of direct traceability and the refinement of high-precision accelerometer measurement paradigms.
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