Volume 67 Issue 6
Jun.  2023
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LIU Liqin, GUAN Yuqing, ZOU Wenzhe, GUO Chuangwei, ZHANG Yujie, XU Ruishu, FU Yunxia, LEI Lihua. Study on the Calibration Method of Nano-Positioning Stages Using Grating Interferometers[J]. Metrology Science and Technology, 2023, 67(6): 37-43. doi: 10.12338/j.issn.2096-9015.2023.0114
Citation: LIU Liqin, GUAN Yuqing, ZOU Wenzhe, GUO Chuangwei, ZHANG Yujie, XU Ruishu, FU Yunxia, LEI Lihua. Study on the Calibration Method of Nano-Positioning Stages Using Grating Interferometers[J]. Metrology Science and Technology, 2023, 67(6): 37-43. doi: 10.12338/j.issn.2096-9015.2023.0114

Study on the Calibration Method of Nano-Positioning Stages Using Grating Interferometers

doi: 10.12338/j.issn.2096-9015.2023.0114
  • Received Date: 2023-04-21
  • Accepted Date: 2023-08-01
  • Rev Recd Date: 2023-07-27
  • Available Online: 2023-08-23
  • Publish Date: 2023-06-18
  • As the critical dimensions in integrated circuit manufacturing approach the 5nm node, the demand for the industrialization of integrated circuit testing equipment has surged. The nano-positioning stage, a pivotal component in semiconductor manufacturing, ultra-precision machining, and precision instrument manufacturing, is experiencing increasingly stringent demands for its repetitive positioning accuracy and linearity. The grating interferometer, which leverages the pitch of the grating as a reference material for measurement, showcases remarkable environmental resilience and superior stability. This makes the grating interferometer an emerging trend in the industrialization of macro-nano measurement equipment. This study presents a calibration method for the nano-positioning stage using a grating interferometer. The feasibility of this method is confirmed through experimental validations. Furthermore, an in-depth analysis of the measurement uncertainty and traceability chain is conducted, highlighting the robustness and shortened traceability path of the proposed calibration approach.
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