Development and Metrological Techniques of Nano-Step Height Reference Materials Based on Laser Traceability

With the rapid growth of the semiconductor industry, the demand for high-precision, small-scale three-dimensional nanomanufacturing techniques has increased, necessitating the development of corresponding nanogeometry reference materials. In response, China has independently developed a series of nano-step height reference materials comparable to international standards, achieving traceability to the meter definition through laser wavelength. This initiative has significantly contributed to supporting technological research across various domains, breaking foreign monopolies, enhancing China's nano-geometry value transfer system, and fostering the nano industry's growth. This paper reviews and compares domestic and international research on nano-step height reference materials, summarizing the fabrication methods and metrology techniques. It aims to provide references and insights for future research on nano-step height reference materials and other micro- and nano-geometry reference materials.