An Instrument for Micro-Newton Force Measurement with Uncertainty in E-5

ZHANG Kai; BAI Yang; ZHANG Zhimin

doi:10.12338/j.issn.2096-9015.2023.0194

Volume 67 Issue 7

Jul. 2023

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ZHANG Kai, BAI Yang, ZHANG Zhimin. An Instrument for Micro-Newton Force Measurement with Uncertainty in E-5[J]. Metrology Science and Technology, 2023, 67(7): 34-39, 33. doi: 10.12338/j.issn.2096-9015.2023.0194

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ZHANG Kai, BAI Yang, ZHANG Zhimin. An Instrument for Micro-Newton Force Measurement with Uncertainty in E-5[J]. Metrology Science and Technology, 2023, 67(7): 34-39, 33. doi: 10.12338/j.issn.2096-9015.2023.0194

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An Instrument for Micro-Newton Force Measurement with Uncertainty in E-5

doi: 10.12338/j.issn.2096-9015.2023.0194

National Institute of Metrology, Beijing 100029, China

Received Date: 2023-08-21
Accepted Date: 2023-09-14
Rev Recd Date: 2023-09-21

Available Online: 2023-09-27

Publish Date: 2023-07-18

Abstract

Abstract

Micro-newton force measurement technology, extensively employed in the domains of space exploration, bio-materials analysis, and micro-nano manufacturing, plays a pivotal role. This study presents a device constructed based on the principle of electrostatic force balance, aimed at measuring micro-newton force values. Addressing the issues encountered in preliminary research, such as excessive stiffness in the vertical direction and significant alignment error of cylindrical capacitors, structural optimization of quadrilateral flexible pivots was undertaken to diminish system stiffness vertically, thereby enhancing the force resolution of the electrostatic force balance. Additionally, calibration of the concentricity of the inner and outer electrodes was achieved based on the capacitance characteristics of cylindrical capacitors. Experimental assessments revealed that the devised micro-newton force measurement device adeptly confines the measurement uncertainty of 100 μN force values to the E-5 level. The outcomes of this research are poised to significantly contribute to the establishment of micro-newton force measurement standard devices and further research on micro-newton force measurement methodologies.
- metrology,
- Planck’s constant,
- electrostatic force balance,
- micro-newton force,
- flexible pivots,
- cylindrical capacitor

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References(30)

References

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