Citation: | SONG Huixu, JIANG Jinzhe, SHI Zhaoyao, YU Bo. High-Precision Measurement Method for Micro Gears Based on White Light Interferometry[J]. Metrology Science and Technology, 2024, 68(4): 3-10. doi: 10.12338/j.issn.2096-9015.2023.0352 |
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