Citation: | LI Jianqiao, SHI Yushu, WANG Fang, LI Wei. Metrological Space of Atomic-Scale Scanning Probe Microscopy under the SI Unit Redefinition[J]. Metrology Science and Technology, 2024, 68(6): 49-54. doi: 10.12338/j.issn.2096-9015.2024.0123 |
[1] |
BIPM, CCL. Report of 17th meeting (14-15 June 2018) to the CIPM [EB/CD]. [2019-08-06]. www. bipm. org/utils/common/pdf/CC/CCL/CCL17. pdf.
|
[2] |
TIESINGA E, MOHR P J, NEWELL D B, et al. CODATA recommended values of the fundamental physical constants: 2018[J]. Journal of physical and chemical reference data, 2021, 50: 033105. doi: 10.1063/5.0064853
|
[3] |
BARTL G, ELSTER C, MARTIN J, et al. Thermal expansion and compressibility of single-crystal silicon between 285 K and 320 K[J]. Measurement Science and Technology, 2020, 31(6): 065013. doi: 10.1088/1361-6501/ab7359
|
[4] |
BECKER P. History and progress in the accurate determination of the Avogadro constant[J]. Rep. Prog. Phys., 2001, 64: 1945-2008. doi: 10.1088/0034-4885/64/12/206
|
[5] |
TANIGUCHI N. Current status in and future trends of ultraprecision machining and ultrafine materials processing[J]. CIRP Annals-Manufacturing Technology, 1983, 32: 573-582. doi: 10.1016/S0007-8506(07)60185-1
|
[6] |
PISANI M, YACOOT A, BALLING P, et al. Comparison of the performance of the next generation of optical interferometers[J]. Metrologia, 2012, 49(4): 455. doi: 10.1088/0026-1394/49/4/455
|
[7] |
LAWALL J R. Fabry-Perot metrology for displacements up to 50 mm[J]. JOSA A, 2005, 22(12): 2786-2798. doi: 10.1364/JOSAA.22.002786
|
[8] |
CELIK M, HAMID R, KUETGENS U, et al. Picometre displacement measurements using a differential Fabry–Perot optical interferometer and an x-ray interferometer[J]. Measurement Science and Technology, 2012, 23(8): 085901. doi: 10.1088/0957-0233/23/8/085901
|
[9] |
YACOOT A, CROSS N. Measurement of picometre non-linearity in an optical grating encoder using x-ray interferometry[J]. Measurement Science and Technology, 2002, 14(1): 148.
|
[10] |
HANKE M, KESSLER E G. Precise lattice parameter comparison of highly perfect silicon crystals[J]. Journal of Physics D: Applied Physics, 2005, 38(10A): A117. doi: 10.1088/0022-3727/38/10A/022
|
[11] |
BECKER P, DORENWENDT K, EBELING G, et al. Absolute measurement of the (220) lattice plane spacing in a silicon crystal[J]. Physical Review Letters, 1981, 46(23): 1540-1543. doi: 10.1103/PhysRevLett.46.1540
|
[12] |
WASEDA A, FUJIMOTO H, ZHANG X W, et al. Homogeneity characterization of lattice spacing of silicon single crystals[J]. 29th Conference on Precision Electromagnetic Measurements (CPEM 2014), 2014: 400-401.
|
[13] |
DAI G, MARKUS H, AND CHRISTIAN K, et al. Reference nano-dimensional metrology by scanning transmission electron microscopy[J]. Measurement Science and Technology, 2013(24): 085001.
|
[14] |
DAI G, KAI H, HARALD B, et al. Comparison of line width calibration using critical dimension atomic force microscopes between PTB and NIST[J]. Measurement Science and Technology, 2017(28): 065010.
|
[15] |
TSAI V, VORBURGER T, DIXSON R, et al. The Study of Silicon Stepped Surfaces as Atomic Force Microscope Calib Standards with a Calibrated AFM at NIST[J]. AIP Conf. Proc. , 1998, 449(1): 839-842.
|
[16] |
DIXSON R, GUTHRIE W, ALLEN R, et al. Process Optimization for Lattice-Selective Wet Etching of Crystalline Silicon Structures[J]. Journal of Micro/Nanolithography, MEMS, and MOEMS, 2016, 15(1): 014503-014503. doi: 10.1117/1.JMM.15.1.014503
|
[17] |
BIPM 2020 Recommendations of CCL/WG-N on: Realization of SI metre using height of monoatomic steps of crystalline silicon surfaces[EB/CD]. [2022-10-31].https://www.bipm.org/utils/common/pdf/CC/CCL/CCL-GD-MeP-3.pdf.
|
[18] |
GARNAES J, NEČAS D, NIELSEN L, et al. Algorithms for using silicon steps for scanning probe microscope evaluation[J]. Metrologia, 2020, 57(6): 064002.
|
[19] |
李伟, 施玉书, 李琪, 等. 单晶硅晶格间距的测量技术进展及应用[J]. 人工晶体学报, 2021, 50(1): 151-157,178.
|
[20] |
WANG F, SHI Y S, ZHANG S, et al. Automatic measurement of silicon lattice spacings in high-resolution transmission electron microscopy images through 2D discrete Fourier transform and inverse discrete Fourier transform[J]. Nanomanufacturing and Metrology, 2022, 5(2): 119-126. doi: 10.1007/s41871-022-00129-7
|
[21] |
WANG F, SHI Y S, LI W, et al. Characterization of a nano line width reference material based on metrological scanning electron microscope[J]. Chinese Physics B, 2022, 31(5): 050601. doi: 10.1088/1674-1056/ac3225
|
[22] |
SULLAN R M, CHURNSIDE A B, NGUYEN D M, et al. Atomic force microscopy with sub-picoNewton force stability for biological applications[J]. Methods, 2013, 60(2): 131-141. doi: 10.1016/j.ymeth.2013.03.029
|
[23] |
BULL M S, SULLAN R M A, LI H B, et al. Improved Single Molecule Force Spectroscopy Using Micromachined Cantilevers[J]. ACS Nano, 2014, 8(5): 4984-4995. doi: 10.1021/nn5010588
|
[24] |
MELCHER J, STIRLING J, CERVANTES F G, et al. A self-calibrating optomechanical force sensor with femtonewton resolution[J]. Applied Physics Letters, 2014, 105(23): 233109. doi: 10.1063/1.4903801
|
[25] |
GUO J, JIANG, Y. Submolecular insights into interfacial water by hydrogen-sensitive scanning probe microscopy[J]. Accounts of Chemical Research, 2022, 55(12): 1680-1692. doi: 10.1021/acs.accounts.2c00111
|
[26] |
CHENG B, WU D, BIAN K, et al. A qPlus-based scanning probe microscope compatible with optical measurements[J]. Review of Scientific Instruments, 2022, 93(4): 043701. doi: 10.1063/5.0082369
|
[27] |
PENG J, GUO J, HAPALA P, et al. Weakly perturbative imaging of interfacial water with submolecular resolution by atomic force microscopy[J]. Nature Communications, 2018, 9(1): 122. doi: 10.1038/s41467-017-02635-5
|
[28] |
MA R, HUAN Q, WU L, et al. Upgrade of a commercial four-probe scanning tunneling microscopy system[J]. Review of Scientific Instruments, 2017, 88(6): 063704. doi: 10.1063/1.4986466
|
[29] |
YAN J H, MA A W, Wang W, et al. A time-shared switching scheme designed for multi-probe scanning tunneling microscope[J]. Review of Scientific Instruments, 2021, 92: 103702.
|
[30] |
HE G, WEI Z, FENG Z, et al. Combinatorial laser molecular beam epitaxy system integrated with specialized low-temperature scanning tunneling microscopy[J]. Review of Scientific Instruments, 2020, 91(1): 013904. doi: 10.1063/1.5119686
|
[31] |
MA R S, LI H, SHI C S, et al. Development of a cryogen-free sub-3 K low-temperature scanning probe microscope by remote liquefaction scheme[J]. Review of Scientific Instruments, 2023, 94: 093701. doi: 10.1063/5.0165089
|
[32] |
LIN T Y, PENG G S. Nanometrology of surface topography: Application to the research in development of a new mass standard[J]. International Journal of Machine Tools and Manufacture, 1998, 38(5-6): 707-713. doi: 10.1016/S0890-6955(97)00121-1
|
[33] |
JALILI N, LAXMINARAYANA K. A review of atomic force microscopy imaging systems: application to molecular metrology and biological sciences[J]. Mechatronics, 2004, 14(8): 907-945. doi: 10.1016/j.mechatronics.2004.04.005
|
[34] |
PENG J B, JIANG Y. qPlus sensor based atomic force microscope[J]. PHYSICS, 2023, 52(3): 186-195.
|
[35] |
K Bian, W Zheng, X Chen, et al. A scanning probe microscope compatible with quantum sensing at ambient conditions[J]. Review of Scientific Instruments, 2024, 95(5): 053707. doi: 10.1063/5.0202756
|
[36] |
CHAIKOOL P, AKETAGAWA M, OKUYAMA E. A two-dimensional atom encoder using one lateral-dithered scanning tunneling microscope (STM) tip and a regular crystalline lattice[J]. Measurement Science and Technology, 2009, 20(8): 084006. doi: 10.1088/0957-0233/20/8/084006
|
[37] |
DIXSON R, ORJI N, MISUMi I, et al. Spatial dimensions in atomic force microscopy: instruments, effects, and measurements[J]. Ultramicroscopy, 2018, 194: 199-214.
|
[38] |
徐毅, 高思田, 李晶. 纳米、亚微米标准样板及SPM量值溯源[J]. 计量学报, 2003, 24(2): 81-84. doi: 10.3321/j.issn:1000-1158.2003.02.001
|
[39] |
石俊凯, 陈晓梅, 万宇, 等. 基于栅格节距中心峰值检测的扫描探针显微镜校准方法[J]. 计测技术, 2024, 44(1): 73-79.
|