Establishment of a Dual Traceability Chain Metrology Standard Device for Micro-Nano Displacement Positioning Calibration

Micro-nano positioning technology is one of the key technologies in the field of cutting-edge science and engineering technology, among which the displacement calibration of micro-nano positioning platforms occupies an important position in the field of precision measurement. National institute of metrology, China has developed a dual traceability chain metrology standard device for micro-nano displacement positioning calibration and established it as a metrology standard. The device includes a laser interferometry micro-nano displacement positioning calibration device and a grating diffraction interferometry micro-nano displacement positioning calibration device, wherein the laser interferometry calibration device realizes direct and comprehensive calibration of the nano-micro displacement platform through a six-degree-of-freedom laser interferometer calibration system, and in the traceability chain, the value is traced back to the wavelength reference defined by meters through a laser interferometer; The grating diffraction interferometry calibration device is based on a one-dimensional nano-grating reference material. In this traceability chain, the value is indirectly traced back to the wavelength standard defined in meters through the grating pitch. The dual traceability chain metrology standard device meets the diverse application needs of micro-nano positioning calibration and enhances the comprehensiveness and reliability of the traceability chain, which helps to establish a calibration-related metrology system for our country's micro-nano positioning platforms and provide a reference for our country's independent innovation and technological development in the field of micro-nano positioning technology.