LI Xu, ZHANG Ran, ZHANG Mingyu, GENG Yongfeng, ZHANG Yi, GAO Huifang, REN Lingling. The Calibration Method of Transmission Electron Microscope[J]. Metrology Science and Technology, 2021, 65(4): 40-44, 18. DOI: 10.3969/j.issn.2096-9015.2021.04.08
    Citation: LI Xu, ZHANG Ran, ZHANG Mingyu, GENG Yongfeng, ZHANG Yi, GAO Huifang, REN Lingling. The Calibration Method of Transmission Electron Microscope[J]. Metrology Science and Technology, 2021, 65(4): 40-44, 18. DOI: 10.3969/j.issn.2096-9015.2021.04.08
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    The Calibration Method of Transmission Electron Microscope

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    • In this paper, reference materials for transmission electron microscope (TEM) magnification calibration and their traceability were studied, and the TEM magnification and contamination/drift rate calibration methods and uncertainty evaluation of calibration results were carried out. This study can provide an accurate and reliable calibration method for measuring the results of TEM in scientific research and industrial applications.
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